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Ownership Document
|
| Schema Version: X0508 |
| Document Type: 4 |
| Period of Report: 3/15/24 |
| Issuer: |
| Issuer CIK: 1113232 |
| Issuer Name: AXCELIS TECHNOLOGIES INC |
| Issuer Trading Symbol: ACLS |
| Reporting Owner: |
| Reporting Owner ID: |
| | Owner CIK: 1208109 |
| | Owner Name: GRAVES GREGORY B |
| Reporting Owner Address: |
| | Owner Street 1: C/O AXCELIS TECHNOLOGIES, INC. |
| | Owner Street 2: 108 CHERRY HILL DRIVE |
| | Owner City: BEVERLY |
| | Owner State: MA |
| | Owner ZIP Code: 01915 |
| | Owner State Description: |
| Reporting Owner Relationship: |
| | Is Director? Yes |
| | Is Officer? No |
| | Is Ten Percent Owner? No |
| | Is Other? No |
| | Officer Title: |
| | Other Text: |
| Aff 10b5 One: 0 |
| Non-Derivative Table: |
| Non-Derivative Transaction: |
| | Security Title: |
| | | Value: Common Stock |
| | Transaction Date: |
| | | Value: 3/15/24 |
| | Transaction Coding: |
| | | Transaction Form Type: 4 |
| | | Transaction Code: A |
| | | Equity Swap Involved? No |
| | Transaction Amounts: |
| | | Transaction Shares: |
| Value: 1,340 |
| | | Transaction Price Per Share: |
| Value: 0 |
| Footnote ID: F1 |
| | | Transaction Acquired-Disposed Code: |
| Value: A |
| | Post-Transaction Amounts: |
| | | Shares Owned Following Transaction: |
| Value: 1,340 |
| Footnote ID: F2 |
| | Ownership Nature: |
| | | Direct or Indirect Ownership: |
| Value: D |
| | | Nature of Ownership: |
| Value: |
| Non-Derivative Transaction: |
| | Security Title: |
| | | Value: Common Stock |
| | Transaction Date: |
| | | Value: 3/15/24 |
| | Transaction Coding: |
| | | Transaction Form Type: 4 |
| | | Transaction Code: A |
| | | Equity Swap Involved? No |
| | Transaction Amounts: |
| | | Transaction Shares: |
| Value: 670 |
| | | Transaction Price Per Share: |
| Value: 0 |
| Footnote ID: F3 |
| | | Transaction Acquired-Disposed Code: |
| Value: A |
| | Post-Transaction Amounts: |
| | | Shares Owned Following Transaction: |
| Value: 2010 |
| Footnote ID: F2 |
| | Ownership Nature: |
| | | Direct or Indirect Ownership: |
| Value: D |
| | | Nature of Ownership: |
| Value: |
| Derivative Table: |
| Footnotes: |
| Footnote - F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on March 15, 2024. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on March 15, 2025. |
| Footnote - F2: Of the shares held as of March 15, 2024, all were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. |
| Footnote - F3: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on March 15, 2024. Assuming continuation of service on the Board of Directors, these restricted stock units will vest as to 25% of the shares granted on each of March 15, 2025, March 15, 2026, March 15, 2027 and March 15, 2028. |
| Owner Signature: |
| Signature Name: /s/ Lynnette C. Fallon, Attorney-in-Fact |
| Signature Date: 3/15/24 |
