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<?xml version="1.0" encoding="windows-1252"?> |
<ownershipDocument> |
| <schemaVersion> X0306 </schemaVersion> |
| <documentType> 4 </documentType> |
| <periodOfReport> 2020-05-12 </periodOfReport> |
| <notSubjectToSection16> 1 </notSubjectToSection16> |
| <issuer> |
| | <issuerCik> 0001094392 </issuerCik> |
| | <issuerName> RUDOLPH TECHNOLOGIES INC </issuerName> |
| | <issuerTradingSymbol> ONTO </issuerTradingSymbol> |
| | </issuer> |
| <reportingOwner> |
| | <reportingOwnerId> |
| | | <rptOwnerCik> 0001410399 </rptOwnerCik> |
| | | <rptOwnerName> Stultz Timothy J </rptOwnerName> |
| | | </reportingOwnerId> |
| | <reportingOwnerAddress> |
| | | <rptOwnerStreet1> C/O ONTO INNOVATION, INC. </rptOwnerStreet1> |
| | | <rptOwnerStreet2> 16 JONSPIN ROAD </rptOwnerStreet2> |
| | | <rptOwnerCity> WILMINGTON </rptOwnerCity> |
| | | <rptOwnerState> MA </rptOwnerState> |
| | | <rptOwnerZipCode> 01887 </rptOwnerZipCode> |
| | | <rptOwnerStateDescription></rptOwnerStateDescription> |
| | | </reportingOwnerAddress> |
| | <reportingOwnerRelationship> |
| | | <isDirector> 1 </isDirector> |
| | | <isOfficer> 0 </isOfficer> |
| | | <isTenPercentOwner> 0 </isTenPercentOwner> |
| | | <isOther> 0 </isOther> |
| | | </reportingOwnerRelationship> |
| | </reportingOwner> |
| <remarks> This exit Form 4 is filed solely to report that, effective May 12, 2020, the reporting person is no longer a 'director' of Onto Innovation Inc. within the meaning of Rule 16a-1. </remarks> |
| <ownerSignature> |
| | <signatureName> /s/ Robert A. Koch For: Timothy J. Stultz Ph.D. </signatureName> |
| | <signatureDate> 2020-05-13 </signatureDate> |
| | </ownerSignature> |
| </ownershipDocument> |