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| <?xml version="1.0" encoding="windows-1252"?> |
| <ownershipDocument> |
| <schemaVersion> X0306 </schemaVersion> |
| <documentType> 4 </documentType> |
| <periodOfReport> 2020-03-04 </periodOfReport> |
| <notSubjectToSection16> 0 </notSubjectToSection16> |
| <issuer> |
| | <issuerCik> 0001113232 </issuerCik> |
| | <issuerName> AXCELIS TECHNOLOGIES INC </issuerName> |
| | <issuerTradingSymbol> ACLS </issuerTradingSymbol> |
| | </issuer> |
| <reportingOwner> |
| | <reportingOwnerId> |
| | | <rptOwnerCik> 0001420601 </rptOwnerCik> |
| | | <rptOwnerName> Lawson Douglas A. </rptOwnerName> |
| | | </reportingOwnerId> |
| | <reportingOwnerAddress> |
| | | <rptOwnerStreet1> C/O AXCELIS TECHNOLOGIES, INC. </rptOwnerStreet1> |
| | | <rptOwnerStreet2> 108 CHERRY HILL DRIVE </rptOwnerStreet2> |
| | | <rptOwnerCity> BEVERLY </rptOwnerCity> |
| | | <rptOwnerState> MA </rptOwnerState> |
| | | <rptOwnerZipCode> 01915 </rptOwnerZipCode> |
| | | <rptOwnerStateDescription></rptOwnerStateDescription> |
| | | </reportingOwnerAddress> |
| | <reportingOwnerRelationship> |
| | | <isDirector> 0 </isDirector> |
| | | <isOfficer> 1 </isOfficer> |
| | | <isTenPercentOwner> 0 </isTenPercentOwner> |
| | | <isOther> 0 </isOther> |
| | | <officerTitle> EVP, Corporate Mktg & Strategy </officerTitle> |
| | | </reportingOwnerRelationship> |
| | </reportingOwner> |
| <nonDerivativeTable> |
| | <nonDerivativeTransaction> |
| | | <securityTitle> |
| <value> Common Stock </value> |
| </securityTitle> |
| | | <transactionDate> |
| <value> 2020-03-04 </value> |
| </transactionDate> |
| | | <deemedExecutionDate></deemedExecutionDate> |
| | | <transactionCoding> |
| <transactionFormType> 4 </transactionFormType> |
| <transactionCode> S </transactionCode> |
| <equitySwapInvolved> 0 </equitySwapInvolved> |
| </transactionCoding> |
| | | <transactionTimeliness> |
| <value></value> |
| </transactionTimeliness> |
| | | <transactionAmounts> |
| <transactionShares> |
| <value> 9019 </value> |
| </transactionShares> |
| <transactionPricePerShare> |
| <value> 24.05 </value> |
| </transactionPricePerShare> |
| <transactionAcquiredDisposedCode> |
| <value> D </value> |
| </transactionAcquiredDisposedCode> |
| </transactionAmounts> |
| | | <postTransactionAmounts> |
| <sharesOwnedFollowingTransaction> |
| <value> 53834 </value> |
| <footnoteId id="F1"/> |
| </sharesOwnedFollowingTransaction> |
| </postTransactionAmounts> |
| | | <ownershipNature> |
| <directOrIndirectOwnership> |
| <value> D </value> |
| </directOrIndirectOwnership> |
| </ownershipNature> |
| | | </nonDerivativeTransaction> |
| | <nonDerivativeHolding> |
| | | <securityTitle> |
| <value> Common Stock </value> |
| </securityTitle> |
| | | <postTransactionAmounts> |
| <sharesOwnedFollowingTransaction> |
| <value> 3125 </value> |
| </sharesOwnedFollowingTransaction> |
| </postTransactionAmounts> |
| | | <ownershipNature> |
| <directOrIndirectOwnership> |
| <value> I </value> |
| </directOrIndirectOwnership> |
| <natureOfOwnership> |
| <value> Held by Spouse </value> |
| </natureOfOwnership> |
| </ownershipNature> |
| | | </nonDerivativeHolding> |
| | </nonDerivativeTable> |
| <footnotes> |
| | <footnote id="F1"> Of the shares held as of March 4, 2020, 31,917 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. </footnote> |
| | </footnotes> |
| <remarks></remarks> |
| <ownerSignature> |
| | <signatureName> Lynnette C. Fallon, as attorney in fact for Douglas A. Lawson </signatureName> |
| | <signatureDate> 2020-03-04 </signatureDate> |
| | </ownerSignature> |
| </ownershipDocument> |
