| | | | | | | | | | | | | | | | | | | | | |
Ownership Document |
Schema Version: X0206 |
Document Type: 3 |
Period of Report: 3/4/24 |
No Securities Owned: 1 |
Issuer: |
| Issuer CIK: 1049502 |
| Issuer Name: MKS INSTRUMENTS INC |
| Issuer Trading Symbol: MKSI |
Reporting Owner: |
| Reporting Owner ID: |
| | Owner CIK: 1732461 |
| | Owner Name: McCarthy Michelle M |
| Reporting Owner Address: |
| | Owner Street 1: C/O MKS INSTRUMENTS, INC. |
| | Owner Street 2: 2 TECH DRIVE, SUITE 201 |
| | Owner City: ANDOVER |
| | Owner State: MA |
| | Owner ZIP Code: 01810 |
| | Owner State Description: |
| Reporting Owner Relationship: |
| | Is Officer? Yes |
| | Officer Title: VP & Chief Accounting Officer |
Footnotes: |
Remarks: Exhibit 24 - Power of Attorney |
Owner Signature: |
| Signature Name: /s/ M. Kathryn Rickards, attorney-in-fact |
| Signature Date: 3/7/24 |