As Of	Filer	Filing¹	For·On·As	Docs:Size	Issuer		Filing Agent

  5/8/24  Amtech Systems Inc.               10-Q        3/31/24   78:9.1M                                   Donnelley … Solutions/FA 
  5/8/24  Amtech Systems Inc.               8-K:2,9      5/8/24    9:1.4M                                   Donnelley … Solutions/FA 
 3/18/24  Gibbs Lisa                        4          Dir.,Off.²  1:5K   Amtech Systems Inc.               Donnelley … Solutions/FA 
 3/13/24  Ludwig Michael M                  4          Director²   1:4K   Amtech Systems Inc.               Donnelley … Solutions/FA 
  3/8/24  Garnreiter Michael                4          Director²   1:5K   Amtech Systems Inc.               Donnelley … Solutions/FA 
  3/8/24  Ludwig Michael M                  4          Director²   1:7K   Amtech Systems Inc.               Donnelley … Solutions/FA 
  3/8/24  Amtech Systems Inc.               8-K:5,9      3/6/24    8:180K                                   Donnelley … Solutions/FA 
  3/8/24  Averick Robert M                  4          Dir.,%Own.² 1:9K   Amtech Systems Inc.               Toppan Merrill/FA        
  3/5/24  Amtech Systems Inc.               8-K:4,9      3/1/24    9:160K                                   Donnelley … Solutions/FA 
  3/4/24  Daigle Robert C                   4          Dir.,Off.²  1:9K   Amtech Systems Inc.               Donnelley … Solutions/FA 
  3/4/24  Ludwig Michael M                  4          Director²   1:6K   Amtech Systems Inc.               Donnelley … Solutions/FA 
  3/4/24  Garnreiter Michael                4          Director²   1:6K   Amtech Systems Inc.               Donnelley … Solutions/FA 
  3/4/24  Averick Robert M                  4          Dir.,%Own.² 1:10K  Amtech Systems Inc.               Toppan Merrill/FA        
 2/29/24  Amtech Systems Inc.               8-K:5,9     2/29/24    8:147K                                   Donnelley … Solutions/FA 
 2/15/24  Daigle Robert C                   4          Dir.,Off.²  1:5K   Amtech Systems Inc.               Donnelley … Solutions/FA 
 2/15/24  SEC                               UPLOAD¶     3/15/24    2:39K  Amtech Systems Inc.                                        
 2/14/24  Averick Robert M                  4          Dir.,%Own.² 1:10K  Amtech Systems Inc.               Toppan Merrill/FA        
 2/12/24  Pacific Ridge Cap Partners, LLC   SC 13G/A               1:8K   Amtech Systems Inc.                                        
  2/9/24  Amtech Systems Inc.               10-Q       12/31/23   78:8.4M                                   Donnelley … Solutions/FA 
  2/9/24  Amtech Systems Inc.               8-K:2,9      2/9/24    9:973K                                   Donnelley … Solutions/FA 

____________
¹	Filing/Form Types:  /A
	4	Statement of Changes in Beneficial Ownership of Securities by an Insider — Form 4 { The Filer is an Insider² of the Issuer }.
	8-K	Current Report — Form 8-K { Item 1: Business & Operations;  2: Financial Info;  3: Securities & Trading;  4: Accountants & Accounting;  5: Governance & Management;  6: Asset-Backed Securities;  7: Disclosures;  8: Events;  9: Financials }.
	10-Q	Quarterly Report — Form 10-Q.
	SC 13G	Statement of Acquisition of Beneficial Ownership by a “Passive” Investor — Schedule 13G.
	UPLOAD	Comment or Other Letter from the SEC.
	/A	Amendment to, or Amended version of, a previous Filing of this Type.
	¶	This Filing contains a delayed-release Document.
²	Insider:  The Filer is a Director, Officer, 10% Owner and/or Other “insider” of the Issuer.