SEC Info℠  
    Home      Search      My Interests      Help      Sign In      Please Sign In

MKS Instruments Inc. – ‘10-Q’ for 9/30/23 – ‘EX-101.CAL’

On:  Wednesday, 11/8/23, at 3:39pm ET   ·   For:  9/30/23   ·   Accession #:  950170-23-61045   ·   File #:  0-23621

Previous ‘10-Q’:  ‘10-Q’ on 8/4/23 for 6/30/23   ·   Next & Latest:  ‘10-Q’ on 5/9/24 for 3/31/24   ·   5 References:   

Find Words in Filings emoji
 		  in    Show  and   ↓Hints

  As Of               Filer                 Filing    For·On·As Docs:Size             Issuer                      Filing Agent

11/08/23  MKS Instruments Inc.              10-Q        9/30/23  101:16M                                    Donnelley … Solutions/FA

Quarterly Report   —   Form 10-Q

Filing Table of Contents

Document/Exhibit                   Description                      Pages   Size 

 1: 10-Q        Quarterly Report                                    HTML   3.85M 
 2: EX-31.1     Certification -- §302 - SOA'02                      HTML     35K 
 3: EX-31.2     Certification -- §302 - SOA'02                      HTML     35K 
 4: EX-32.1     Certification -- §906 - SOA'02                      HTML     33K 
10: R1          Cover Page                                          HTML     81K 
11: R2          Condensed Consolidated Balance Sheets (Unaudited)   HTML    138K 
12: R3          Condensed Consolidated Balance Sheets (Unaudited)   HTML     52K 
                (Parenthetical)                                                  
13: R4          Condensed Consolidated Statements of Operations     HTML    142K 
                and Comprehensive (Loss) Income (Unaudited)                      
14: R5          Condensed Consolidated Statements of Stockholders'  HTML     98K 
                Equity (Unaudited)                                               
15: R6          Condensed Consolidated Statements of Stockholders'  HTML     31K 
                Equity (Unaudited) (Parenthetical)                               
16: R7          Condensed Consolidated Statements of Cash Flows     HTML    125K 
                (Unaudited)                                                      
17: R8          Pay vs Performance Disclosure                       HTML     42K 
18: R9          Insider Trading Arrangements                        HTML     52K 
19: R10         Basis of Presentation                               HTML     35K 
20: R11         Revenue from Contracts with Customers               HTML    186K 
21: R12         Fair Value Measurements                             HTML    334K 
22: R13         Derivatives                                         HTML    287K 
23: R14         Inventories                                         HTML     47K 
24: R15         Acquisition                                         HTML    122K 
25: R16         Goodwill and Intangible Assets                      HTML    176K 
26: R17         Debt                                                HTML    100K 
27: R18         Product Warranties                                  HTML     58K 
28: R19         Other Current Liabilities                           HTML     53K 
29: R20         Income Taxes                                        HTML     37K 
30: R21         Net Income (Loss) Per Share                         HTML     92K 
31: R22         Stock-Based Compensation                            HTML     86K 
32: R23         Stockholders' Equity                                HTML     41K 
33: R24         Business Segment, Geographic Area, and Significant  HTML    412K 
                Customer Information                                             
34: R25         Restructuring                                       HTML     54K 
35: R26         Commitments and Contingencies                       HTML     33K 
36: R27         Subsequent Events                                   HTML     35K 
37: R28         Revenue from Contracts with Customers (Tables)      HTML    183K 
38: R29         Fair Value Measurements (Tables)                    HTML    328K 
39: R30         Derivatives (Tables)                                HTML    284K 
40: R31         Inventories (Tables)                                HTML     48K 
41: R32         Acquisition (Tables)                                HTML    120K 
42: R33         Goodwill and Intangible Assets (Tables)             HTML    166K 
43: R34         Debt (Tables)                                       HTML     63K 
44: R35         Product Warranties (Tables)                         HTML     52K 
45: R36         Other Current Liabilities (Tables)                  HTML     53K 
46: R37         Net Income (Loss) Per Share (Tables)                HTML     90K 
47: R38         Stock-Based Compensation (Tables)                   HTML     84K 
48: R39         Business Segment, Geographic Area, and Significant  HTML    409K 
                Customer Information (Tables)                                    
49: R40         Restructuring (Tables)                              HTML     49K 
50: R41         Revenue from Contracts with Customers - Additional  HTML     33K 
                Information (Detail)                                             
51: R42         Revenue from Contracts with Customers - Schedule    HTML     37K 
                of Deferred Revenue and Customer Advances by                     
                Arrangement (Detail)                                             
52: R43         Revenue from Contracts with Customers - Schedule    HTML     37K 
                of Deferred Revenue and Customer Advances by                     
                Arrangement (Parenthetical) (Detail)                             
53: R44         Revenue from Contracts with Customers - Summary of  HTML     55K 
                Revenue from Contracts with Customers (Detail)                   
54: R45         Fair Value Measurements - Schedule of Fair Value    HTML    121K 
                of Assets and Liabilities Measured on Recurring                  
                Basis (Detail)                                                   
55: R46         Fair Value Measurements - Schedule of Estimated     HTML     35K 
                Carrying Value and Fair Value of Company's Debt                  
                (Details)                                                        
56: R47         Derivatives - Additional Information (Detail)       HTML     53K 
57: R48         Derivatives - Summary of Primary Net Hedging        HTML     62K 
                Positions and Fair Values of Foreign Exchange                    
                Forward Contracts Outstanding (Detail)                           
58: R49         Derivatives - Summary of Net (Gains) on             HTML     43K 
                Derivatives Designated as Cash Flow Hedging                      
                Instruments (Detail)                                             
59: R50         Derivatives - Summary of The Terms And Fair Values  HTML     83K 
                of Interest Rate Swaps and Interest Rate Caps                    
                (Detail)                                                         
60: R51         Derivatives - Summary of Losses on Derivatives Not  HTML     33K 
                Designated as Hedging Instruments (Detail)                       
61: R52         Inventories - Summary of Inventories (Detail)       HTML     38K 
62: R53         Acquisition - Additional Information (Detail)       HTML     43K 
63: R54         Acquisition - Summary of Purchase Price (Detail)    HTML     44K 
64: R55         Acquisition - Summary of Estimated Fair Value of    HTML     74K 
                Assets Acquired and Liabilities Assumed (Detail)                 
65: R56         Acquisition - Allocation of Acquired Intangible     HTML     54K 
                Assets and Liabilities Related Estimates of Useful               
                Lives (Detail)                                                   
66: R57         Acquisition - Schedule of Revenue and Net Income    HTML     35K 
                (Details)                                                        
67: R58         Goodwill and Intangible Assets - Summary of         HTML     43K 
                Quantitative Assessment (Detail)                                 
68: R59         Goodwill and Intangible Assets - Goodwill (Detail)  HTML     50K 
69: R60         Goodwill and Intangible Assets - Intangible Assets  HTML     54K 
                (Detail)                                                         
70: R61         Goodwill and Intangible Assets - Additional         HTML     75K 
                Information (Detail)                                             
71: R62         Goodwill and Intangible Assets - Estimated Net      HTML     44K 
                Amortization Expense (Detail)                                    
72: R63         Debt - Schedule of Short-Term Debt (Detail)         HTML     34K 
73: R64         Debt - Schedule of Long-Term Debt (Detail)          HTML     41K 
74: R65         Debt - Additional Information (Detail)              HTML     39K 
75: R66         Debt - New Credit Facilities - Additional           HTML    131K 
                Information (Detail)                                             
76: R67         Debt - Lines of Credit and Borrowing Arrangements   HTML     45K 
                - Additional Information (Detail)                                
77: R68         Debt - Schedule of Contractual Maturities of Debt   HTML     48K 
                Obligations (Detail)                                             
78: R69         Product Warranties - Product Warranty Activities    HTML     40K 
                (Detail)                                                         
79: R70         Product Warranties - Additional Information         HTML     38K 
                (Detail)                                                         
80: R71         Other Current Liabilities - Summary of Other        HTML     42K 
                Current Liabilities (Detail)                                     
81: R72         Income Taxes - Additional Information (Detail)      HTML     31K 
82: R73         Net Income (Loss) Per Share - Computation of Basic  HTML     68K 
                and Diluted Net Income (Loss) Per Share (Detail)                 
83: R74         Stock-Based Compensation - Schedule of Total        HTML     39K 
                Stock-Based Compensation Expense Included in                     
                Company's Condensed Consolidated Statements of                   
                Operations and Comprehensive (Loss) Income                       
                (Detail)                                                         
84: R75         Stock-Based Compensation - Additional Information   HTML     33K 
                (Detail)                                                         
85: R76         Stock-Based Compensation - Summary of Activity for  HTML     53K 
                RSUs (Detail)                                                    
86: R77         Stockholders' Equity - Additional Information       HTML     44K 
                (Detail)                                                         
87: R78         Business Segment, Geographic Area, and Significant  HTML     31K 
                Customer Information - Additional Information                    
                (Detail)                                                         
88: R79         Business Segment, Geographic Area, and Significant  HTML     41K 
                Customer Information - Net Revenues by Reportable                
                Segment (Detail)                                                 
89: R80         Business Segment, Geographic Area, and Significant  HTML     98K 
                Customer Information - Schedule of Reconciles                    
                Gross Profit By Reportable Segment To Net (Loss)                 
                Income (Detail)                                                  
90: R81         Business Segment, Geographic Area, and Significant  HTML     45K 
                Customer Information - Segment Assets by                         
                Reportable Segment (Detail)                                      
91: R82         Business Segment, Geographic Area, and Significant  HTML     58K 
                Customer Information - Reconciles Segment Assets                 
                to Total Assets (Detail)                                         
92: R83         Business Segment, Geographic Area, and Significant  HTML     53K 
                Customer Information - Schedule of Net Revenues                  
                and Long-Lived Assets by Geographic Regions                      
                (Detail)                                                         
93: R84         Business Segment, Geographic Area, and Significant  HTML     57K 
                Customer Information - Summary of Goodwill                       
                Associated with Reportable Segments (Detail)                     
94: R85         Restructuring - Additional Information (Detail)     HTML     35K 
95: R86         Restructuring - Schedule of Restructuring           HTML     36K 
                Activities (Detail)                                              
96: R87         Subsequent Events - Additional Information          HTML     53K 
                (Details)                                                        
99: XML         IDEA XML File -- Filing Summary                      XML    193K 
97: XML         XBRL Instance -- mksi-20230930_htm                   XML   4.75M 
98: EXCEL       IDEA Workbook of Financial Report Info              XLSX    174K 
 6: EX-101.CAL  XBRL Calculations -- mksi-20230930_cal               XML    202K 
 5: EX-101.DEF  XBRL Definitions -- mksi-20230930_def                XML    857K 
 8: EX-101.LAB  XBRL Labels -- mksi-20230930_lab                     XML   1.64M 
 9: EX-101.PRE  XBRL Presentations -- mksi-20230930_pre              XML   1.28M 
 7: EX-101.SCH  XBRL Schema -- mksi-20230930                         XSD    250K 
100: JSON        XBRL Instance as JSON Data -- MetaLinks              636±   990K  
101: ZIP         XBRL Zipped Folder -- 0000950170-23-061045-xbrl      Zip    429K

‘EX-101.CAL’   —   XBRL Calculations — mksi-20230930_cal

This Exhibit is an XBRL File.

                                                                                                                                                                                
<?xml version="1.0" encoding="windows-1252"?>
<!-- DFIN New ActiveDisclosure (SM) XBRL Linkbase Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date :2023-11-08T09:27:15.4583+00:00 -->
<!-- Copyright (c) 2023 Donnelly Financial Solutions, Inc. All Rights Reserved. -->
<link:linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/Role_StatementCondensedConsolidatedBalanceSheetsUnaudited" xlink:href="mksi-20230930.xsd#Role_StatementCondensedConsolidatedBalanceSheetsUnaudited" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/StatementCondensedConsolidatedStatementsOfOperationsAndComprehensiveLossIncomeUnaudited" xlink:href="mksi-20230930.xsd#StatementCondensedConsolidatedStatementsOfOperationsAndComprehensiveLossIncomeUnaudited" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/Role_StatementCondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:href="mksi-20230930.xsd#Role_StatementCondensedConsolidatedStatementsOfCashFlowsUnaudited" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/Role_DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisDetail" xlink:href="mksi-20230930.xsd#Role_DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisDetail" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/Role_DisclosureInventoriesSummaryOfInventoriesDetail" xlink:href="mksi-20230930.xsd#Role_DisclosureInventoriesSummaryOfInventoriesDetail" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/DisclosureAcquisitionSummaryOfPurchasePriceDetail" xlink:href="mksi-20230930.xsd#DisclosureAcquisitionSummaryOfPurchasePriceDetail" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/DisclosureAcquisitionSummaryOfEstimatedFairValueOfAssetsAcquiredAndLiabilitiesAssumedDetail" xlink:href="mksi-20230930.xsd#DisclosureAcquisitionSummaryOfEstimatedFairValueOfAssetsAcquiredAndLiabilitiesAssumedDetail" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/DisclosureOtherCurrentLiabilitiesSummaryOfOtherCurrentLiabilitiesDetail" xlink:href="mksi-20230930.xsd#DisclosureOtherCurrentLiabilitiesSummaryOfOtherCurrentLiabilitiesDetail" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/DisclosureNetIncomeLossPerShareComputationOfBasicAndDilutedNetIncomeLossPerShareDetail" xlink:href="mksi-20230930.xsd#DisclosureNetIncomeLossPerShareComputationOfBasicAndDilutedNetIncomeLossPerShareDetail" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/DisclosureBusinessSegmentGeographicAreaAndSignificantCustomerInformationScheduleOfReconcilesGrossProfitByReportableSegmentToNetLossIncome" xlink:href="mksi-20230930.xsd#DisclosureBusinessSegmentGeographicAreaAndSignificantCustomerInformationScheduleOfReconcilesGrossProfitByReportableSegmentToNetLossIncome" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/Role_DisclosureBusinessSegmentGeographicAreaAndSignificantCustomerInformationSegmentAssetsByReportableSegmentDetail" xlink:href="mksi-20230930.xsd#Role_DisclosureBusinessSegmentGeographicAreaAndSignificantCustomerInformationSegmentAssetsByReportableSegmentDetail" xlink:type="simple"/>
<link:roleRef roleURI="http://www.mksinst.com/20230930/taxonomy/role/DisclosureBusinessSegmentGeographicAreaAndSignificantCustomerInformationReconcilesSegmentAssetsToTotalAssetsDetail" xlink:href="mksi-20230930.xsd#DisclosureBusinessSegmentGeographicAreaAndSignificantCustomerInformationReconcilesSegmentAssetsToTotalAssetsDetail" xlink:type="simple"/>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/Role_StatementCondensedConsolidatedBalanceSheetsUnaudited">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_Liabilities" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_ShortTermBorrowings" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_AssetsCurrent" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_LiabilitiesCurrent" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_PreferredStockValue" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_ShortTermInvestments" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_CommitmentsAndContingencies" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_AccountsPayableCurrent" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_LongTermDebt" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_CommonStockValue" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_AccountsReceivableNetCurrent" order="2" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_StockholdersEquity" order="2" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset" order="2" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_DeferredIncomeTaxLiabilitiesNet" order="2" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_AdditionalPaidInCapitalCommonStock" order="2" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_InventoryNet" order="3" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_Goodwill" order="3" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent" order="3" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit" order="3" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_OtherAssetsCurrent" order="4" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet" order="4" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="mksi_NonCurrentLeaseLiability" order="4" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" order="4" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OtherAssetsNoncurrent" order="6" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_OtherLiabilitiesNoncurrent" order="6" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_OtherLiabilitiesCurrent" order="7" weight="1.00" use="optional"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermBorrowings" xlink:label="us-gaap_ShortTermBorrowings"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PreferredStockValue" xlink:label="us-gaap_PreferredStockValue"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="us-gaap_CommitmentsAndContingencies"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongTermDebt" xlink:label="us-gaap_LongTermDebt"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockValue" xlink:label="us-gaap_CommonStockValue"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdditionalPaidInCapitalCommonStock" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherAssetsCurrent" xlink:label="us-gaap_OtherAssetsCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_NonCurrentLeaseLiability" xlink:label="mksi_NonCurrentLeaseLiability"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/StatementCondensedConsolidatedStatementsOfOperationsAndComprehensiveLossIncomeUnaudited">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_NetIncomeLoss" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_OperatingIncomeLoss" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_GrossProfit" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_GrossProfit" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLoss" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_ResearchAndDevelopmentExpense" order="1" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_GrossProfit" xlink:to="us-gaap_CostOfGoodsAndServicesSold" order="1" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLoss" xlink:to="us-gaap_IncomeTaxExpenseBenefit" order="1" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" order="2" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_InterestAndOtherIncome" order="2" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense" order="2" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" order="3" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_InterestExpense" order="3" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_BusinessCombinationAcquisitionRelatedCosts" order="3" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" order="4" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_OtherNonoperatingIncomeExpense" order="4" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_RestructuringCharges" order="4" weight="-1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" order="5" weight="-1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" order="6" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" order="6" weight="-1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_AmortizationOfIntangibleAssets" order="7" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" order="8" weight="1" use="optional"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InterestAndOtherIncome" xlink:label="us-gaap_InterestAndOtherIncome"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationAcquisitionRelatedCosts" xlink:label="us-gaap_BusinessCombinationAcquisitionRelatedCosts"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" xlink:label="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/Role_StatementCondensedConsolidatedStatementsOfCashFlowsUnaudited">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_ProfitLoss" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" order="0" weight="-1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_ProceedsFromBankDebt" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_DepreciationAndAmortization" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_RepaymentsOfDebt" order="1" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="mksi_AmortizationOfInventoryStepUpToFairValue" order="2" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities" order="2" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" order="3" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" order="3" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" order="3" weight="-1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_PaymentsOfDividendsCommonStock" order="3" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities" order="4" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_UnrealizedGainLossOnDerivatives" order="5" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities" order="5" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="mksi_ProceedsFromPaymentsForEmployeeStockAwards" order="5" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_AmortizationOfFinancingCostsAndDiscounts" order="6" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" order="6" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" order="7" weight="-1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" order="8" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_ShareBasedCompensation" order="9" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_InventoryWriteDown" order="10" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_OtherNoncashIncomeExpense" order="11" weight="-1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit" order="12" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable" order="15" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingAssets" order="16" weight="-1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="mksi_AccruedCompensation" order="18" weight="-1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInInventories" order="19" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableTrade" order="20" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" order="22" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities" order="23" weight="1.00" use="optional"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromBankDebt" xlink:label="us-gaap_ProceedsFromBankDebt"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DepreciationAndAmortization" xlink:label="us-gaap_DepreciationAndAmortization"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RepaymentsOfDebt" xlink:label="us-gaap_RepaymentsOfDebt"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_AmortizationOfInventoryStepUpToFairValue" xlink:label="mksi_AmortizationOfInventoryStepUpToFairValue"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsOfDividendsCommonStock" xlink:label="us-gaap_PaymentsOfDividendsCommonStock"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromPaymentsForOtherFinancingActivities" xlink:label="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrealizedGainLossOnDerivatives" xlink:label="us-gaap_UnrealizedGainLossOnDerivatives"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_ProceedsFromPaymentsForEmployeeStockAwards" xlink:label="mksi_ProceedsFromPaymentsForEmployeeStockAwards"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryWriteDown" xlink:label="us-gaap_InventoryWriteDown"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherNoncashIncomeExpense" xlink:label="us-gaap_OtherNoncashIncomeExpense"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInOtherOperatingAssets" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingAssets"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_AccruedCompensation" xlink:label="mksi_AccruedCompensation"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccountsPayableTrade" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableTrade"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInOtherOperatingLiabilities" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/Role_DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisDetail">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure" order="0" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DerivativeLiabilities" xlink:to="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="mksi_CurrentAssetsFairValueDisclosure" xlink:to="mksi_CashEquivalentsFairValueDisclosure" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="mksi_NonCurrentAssetsFairValueDisclosure" xlink:to="mksi_OtherNonCurrentAssetsFairValueDisclosure" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DerivativeLiabilities" xlink:to="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="mksi_CurrentAssetsFairValueDisclosure" xlink:to="us-gaap_ShortTermInvestments" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue" order="2" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DerivativeLiabilities" xlink:to="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" order="2" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="mksi_CurrentAssetsFairValueDisclosure" xlink:to="mksi_OtherCurrentAssetsFairValueDisclosure" order="2" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" order="3" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="mksi_DerivativeFairValueOfDerivativeLiabilityAmountNotOffsetAgainstCollateralCurrent" order="4" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" order="5" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="mksi_DeferredCompensationPlanAssetsFairValueDisclosure" order="6" weight="1.00" use="optional"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetsFairValueDisclosure" xlink:label="us-gaap_AssetsFairValueDisclosure"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DerivativeLiabilities" xlink:label="us-gaap_DerivativeLiabilities"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_CurrentAssetsFairValueDisclosure" xlink:label="mksi_CurrentAssetsFairValueDisclosure"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_CashEquivalentsFairValueDisclosure" xlink:label="mksi_CashEquivalentsFairValueDisclosure"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_NonCurrentAssetsFairValueDisclosure" xlink:label="mksi_NonCurrentAssetsFairValueDisclosure"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_OtherNonCurrentAssetsFairValueDisclosure" xlink:label="mksi_OtherNonCurrentAssetsFairValueDisclosure"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:label="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_OtherCurrentAssetsFairValueDisclosure" xlink:label="mksi_OtherCurrentAssetsFairValueDisclosure"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_DerivativeFairValueOfDerivativeLiabilityAmountNotOffsetAgainstCollateralCurrent" xlink:label="mksi_DerivativeFairValueOfDerivativeLiabilityAmountNotOffsetAgainstCollateralCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" xlink:label="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_DeferredCompensationPlanAssetsFairValueDisclosure" xlink:label="mksi_DeferredCompensationPlanAssetsFairValueDisclosure"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/Role_DisclosureInventoriesSummaryOfInventoriesDetail">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves" order="1" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves" order="2" weight="1.00" use="optional"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/DisclosureAcquisitionSummaryOfPurchasePriceDetail">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" xlink:to="mksi_BusinessCombinationCashPaidForOutstandingShares" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" xlink:to="us-gaap_CashAcquiredFromAcquisition" order="1" weight="-1.00" use="optional"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_BusinessCombinationCashPaidForOutstandingShares" xlink:label="mksi_BusinessCombinationCashPaidForOutstandingShares"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAcquiredFromAcquisition" xlink:label="us-gaap_CashAcquiredFromAcquisition"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/DisclosureAcquisitionSummaryOfEstimatedFairValueOfAssetsAcquiredAndLiabilitiesAssumedDetail">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedDeferredTaxLiabilities" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCashAndEquivalents" order="0" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities" order="1" weight="-1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesAccountsPayable" order="1" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsReceivables" order="1" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesOther" order="2" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventory" order="2" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities" xlink:to="mksi_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNonCurrentAccruedCompensation" order="3" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsOther" order="3" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesOther" order="4" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment" order="4" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles" order="6" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets" xlink:to="us-gaap_Goodwill" order="7" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets" xlink:to="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedOtherNoncurrentAssets" order="8" weight="1.00" use="optional"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedDeferredTaxLiabilities" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedDeferredTaxLiabilities"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCashAndEquivalents" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCashAndEquivalents"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesAccountsPayable" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesAccountsPayable"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsReceivables" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsReceivables"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesOther" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesOther"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventory" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventory"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNonCurrentAccruedCompensation" xlink:label="mksi_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNonCurrentAccruedCompensation"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsOther" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssetsOther"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesOther" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilitiesOther"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedOtherNoncurrentAssets" xlink:label="us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedOtherNoncurrentAssets"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/DisclosureOtherCurrentLiabilitiesSummaryOfOtherCurrentLiabilitiesDetail">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent" order="0" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_TaxesPayableCurrent" order="2" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_OtherSundryLiabilitiesCurrent" order="3" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent" order="4" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent" order="5" weight="1" use="optional"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxesPayableCurrent" xlink:label="us-gaap_TaxesPayableCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherSundryLiabilitiesCurrent" xlink:label="us-gaap_OtherSundryLiabilitiesCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/DisclosureNetIncomeLossPerShareComputationOfBasicAndDilutedNetIncomeLossPerShareDetail">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="mksi_WeightedAverageNumberOfDilutedShares" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="mksi_WeightedAverageNumberOfDilutedShares" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" order="1" weight="1" use="optional"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_WeightedAverageNumberOfDilutedShares" xlink:label="mksi_WeightedAverageNumberOfDilutedShares"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/DisclosureBusinessSegmentGeographicAreaAndSignificantCustomerInformationScheduleOfReconcilesGrossProfitByReportableSegmentToNetLossIncome">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLoss" xlink:to="us-gaap_IncomeTaxExpenseBenefit" order="0" weight="-1" use="optional"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/Role_DisclosureBusinessSegmentGeographicAreaAndSignificantCustomerInformationSegmentAssetsByReportableSegmentDetail">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="mksi_SegmentAssets" xlink:to="us-gaap_AccountsReceivableNetCurrent" order="0" weight="1.00" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="mksi_SegmentAssets" xlink:to="us-gaap_InventoryNet" order="1" weight="1.00" use="optional"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_SegmentAssets" xlink:label="mksi_SegmentAssets"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
</link:calculationLink>
<link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20230930/taxonomy/role/DisclosureBusinessSegmentGeographicAreaAndSignificantCustomerInformationReconcilesSegmentAssetsToTotalAssetsDetail">
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="mksi_SegmentAssets" order="0" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" order="1" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OtherAssetsCurrent" order="2" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" order="3" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset" order="4" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_IntangibleAssetsNetIncludingGoodwill" order="5" weight="1" use="optional"/>
<link:calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OtherAssetsNoncurrent" order="6" weight="1" use="optional"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets"/>
<link:loc xlink:type="locator" xlink:href="mksi-20230930.xsd#mksi_SegmentAssets" xlink:label="mksi_SegmentAssets"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherAssetsCurrent" xlink:label="us-gaap_OtherAssetsCurrent"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IntangibleAssetsNetIncludingGoodwill" xlink:label="us-gaap_IntangibleAssetsNetIncludingGoodwill"/>
<link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent"/>
</link:calculationLink>
</link:linkbase>

5 Previous Filings that this Filing References

  As Of               Filer                 Filing    For·On·As Docs:Size             Issuer                      Filing Agent

10/03/23  MKS Instruments Inc.              8-K:1,2,7,910/03/23   12:259K                                   Donnelley … Solutions/FA
 5/06/14  MKS Instruments Inc.              8-K:5,9     5/05/14    6:338K                                   Donnelley … Solutions/FA
 8/13/02  MKS Instruments Inc.              10-Q        6/30/02    8:329K                                   Bowne of Boston/FA
 8/14/01  MKS Instruments Inc.              10-Q        6/30/01    2:78K                                    Bowne of Boston/FA
11/13/00  MKS Instruments Inc.              S-4                   19:783K                                   Bowne of Boston/FA
↑Top
Filing Submission 0000950170-23-061045   –   Alternative Formats (Word / Rich Text, HTML, Plain Text, et al.)
Copyright © 2024 Fran Finnegan & Company LLC – All Rights Reserved.
About — Privacy — Redactions — Help — Mon., May 13, 5:07:50.2pm ET