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Onto Innovation Inc. – ‘10-Q’ for 6/27/20 – ‘XML’

On:  Tuesday, 8/4/20, at 5:37pm ET   ·   For:  6/27/20   ·   Accession #:  1564590-20-36181   ·   File #:  1-39110

Previous ‘10-Q’:  ‘10-Q’ on 5/5/20 for 3/28/20   ·   Next:  ‘10-Q’ on 11/2/20 for 9/26/20   ·   Latest:  ‘10-Q’ on 11/13/23 for 9/30/23   ·   3 References:   

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  As Of               Filer                 Filing    For·On·As Docs:Size             Issuer                      Filing Agent

 8/04/20  Onto Innovation Inc.              10-Q        6/27/20   93:11M                                    ActiveDisclosure/FA

Quarterly Report   —   Form 10-Q
Filing Table of Contents

Document/Exhibit                   Description                      Pages   Size 

 1: 10-Q        Quarterly Report                                    HTML   1.10M 
 2: EX-10.1     Material Contract                                   HTML     82K 
 3: EX-31.1     Certification -- §302 - SOA'02                      HTML     38K 
 4: EX-31.2     Certification -- §302 - SOA'02                      HTML     38K 
 5: EX-32.1     Certification -- §906 - SOA'02                      HTML     30K 
 6: EX-32.2     Certification -- §906 - SOA'02                      HTML     29K 
13: R1          Document and Entity Information Document            HTML     79K 
14: R2          Condensed Consolidated Statements of Operations     HTML     97K 
                (Unaudited)                                                      
15: R3          Condensed Consolidated Statements of Comprehensive  HTML     49K 
                Income (Unaudited)                                               
16: R4          Condensed Consolidated Balance Sheets (Unaudited)   HTML    110K 
17: R5          Condensed Consolidated Balance Sheets               HTML     28K 
                (Parenthetical) (Unaudited)                                      
18: R6          Condensed Consolidated Statements of Cash Flows     HTML     91K 
                (Unaudited)                                                      
19: R7          Condensed Consolidated Statements of Stockholders?  HTML     91K 
                Equity (Unaudited)                                               
20: R8          Basis of Presentation                               HTML     45K 
21: R9          Business Combination                                HTML     67K 
22: R10         Fair Value Measurements                             HTML    235K 
23: R11         Marketable Securities                               HTML    247K 
24: R12         Derivative Instruments and Hedging Activities       HTML     40K 
25: R13         Purchased Intangible Assets                         HTML    120K 
26: R14         Convertible Notes Receivable                        HTML     30K 
27: R15         Balance Sheet Details                               HTML    162K 
28: R16         Commitments and Contingencies                       HTML     58K 
29: R17         Revenue                                             HTML     99K 
30: R18         Share-Based Compensation                            HTML     49K 
31: R19         Other (Expense) Income, Net                         HTML     61K 
32: R20         Income Taxes                                        HTML     65K 
33: R21         Earnings Per Share                                  HTML    134K 
34: R22         Accumulated Other Comprehensive Loss                HTML     55K 
35: R23         Segment Reporting and Geographic Information        HTML    197K 
36: R24         Share Repurchase Authorization                      HTML     61K 
37: R25         Basis of Presentation (Policies)                    HTML     46K 
38: R26         Business Combination (Tables)                       HTML     66K 
39: R27         Fair Value Measurements - (Tables)                  HTML    233K 
40: R28         Marketable Securities - (Tables)                    HTML    248K 
41: R29         Derivative Instruments and Hedging Activities       HTML     38K 
                (Tables)                                                         
42: R30         Purchased Intangible Assets - (Tables)              HTML    121K 
43: R31         Balance Sheet Details (Tables)                      HTML    171K 
44: R32         Commitments and Contingencies (Tables)              HTML     49K 
45: R33         Revenue (Tables)                                    HTML     97K 
46: R34         Share-Based Compensation - (Tables)                 HTML     48K 
47: R35         Other (Expense) Income, Net (Tables)                HTML     61K 
48: R36         Income Taxes - (Tables)                             HTML     60K 
49: R37         Earnings Per Share - (Tables)                       HTML    135K 
50: R38         Accumulated Other Comprehensive Loss (Tables)       HTML     54K 
51: R39         Segment Reporting and Geographic Information -      HTML    197K 
                (Tables)                                                         
52: R40         Share Repurchase Authorization (Tables)             HTML     59K 
53: R41         Business Combination - Textual (Details)            HTML     32K 
54: R42         Business Combination - Summary of Preliminary       HTML     77K 
                Allocation of the Total Purchase Consideration to                
                Initial Estimated Fair Values of the Assets                      
                Acquired and Liabilities Assumed (Details)                       
55: R43         Fair Value Measurements - Schedule of Assets and    HTML     92K 
                Liabilities Carried at Fair Value Measured on a                  
                Recurring Basis (Details)                                        
56: R44         Fair Value Measurements - Fair Value, Liabilities   HTML     38K 
                Measured on Recurring Basis, Unobservable Input                  
                Reconciliation (Details)                                         
57: R45         Marketable Securities - Schedule of Marketable      HTML     55K 
                Securities by Category (Details)                                 
58: R46         Marketable Securities - Schedule of Amortized Cost  HTML     54K 
                and Estimated Fair Value of Marketable Securities                
                Classified by Maturity Date (Details)                            
59: R47         Marketable Securities - Summary of Estimated Fair   HTML     56K 
                Value and Gross Unrealized Holding Losses of                     
                Marketable Securities in Unrealized Loss Position                
                (Details)                                                        
60: R48         Derivative Instruments and Hedging Activities -     HTML     30K 
                Forward Contracts and Related Fair Values                        
                (Details)                                                        
61: R49         Purchased Intangible Assets - Changes in the        HTML     31K 
                Carrying Amount of Goodwill (Details)                            
62: R50         Purchased Intangible Assets - Schedule of           HTML     51K 
                Purchased Intangible Assets (Details)                            
63: R51         Purchased Intangible Assets - Textual (Details)     HTML     43K 
64: R52         Convertible Notes Receivable - Textual (Details)    HTML     38K 
65: R53         Balance Sheet Details - Schedule of Inventories     HTML     36K 
                (Details)                                                        
66: R54         Balance Sheet Details - Schedule of Property,       HTML     45K 
                Plant and Equipment, Net (Details)                               
67: R55         Balance Sheet Details - Schedule of Other Assets    HTML     33K 
                (Details)                                                        
68: R56         Balance Sheet Details - Schedule of Other Assets    HTML     27K 
                (Parenthetical) (Details)                                        
69: R57         Balance Sheet Details - Schedule of Accrued         HTML     36K 
                Liabilities (Details)                                            
70: R58         Balance Sheet Details - Schedule of Other Current   HTML     44K 
                Liabilities (Details)                                            
71: R59         Balance Sheet Details - Schedule of Other           HTML     37K 
                Non-Current Liabilities (Details)                                
72: R60         Commitments and Contingencies - Textual (Details)   HTML     42K 
73: R61         Commitments and Contingencies - Schedule of         HTML     32K 
                Changes in Warranty Reserves (Details)                           
74: R62         Revenue - Schedule of Disaggregation of Revenue by  HTML     36K 
                Timing of Revenue (Details)                                      
75: R63         Revenue - Schedule of Changes in Deferred Revenue   HTML     33K 
                (Details)                                                        
76: R64         Share-Based Compensation - Summary of Restricted    HTML     50K 
                Stock Unit Activity (Details)                                    
77: R65         Share-Based Compensation - Textual (Details)        HTML     32K 
78: R66         Other (Expense) Income, Net - Schedule of Other     HTML     33K 
                (Expense) Income, Net (Details)                                  
79: R67         Income Taxes - Details of Income Tax (Details)      HTML     37K 
80: R68         Income Taxes - Textual (Details)                    HTML     28K 
81: R69         Earnings Per Share - Schedule of Weighted Average   HTML     32K 
                Number of Restricted Stock Units Excluded from                   
                Calculation of Diluted Earnings Per Share                        
                (Details)                                                        
82: R70         Earnings Per Share - Schedule of Basic and Diluted  HTML     54K 
                Earnings Per Share (Details)                                     
83: R71         Accumulated Other Comprehensive Loss - Components   HTML     44K 
                of Accumulated Other Comprehensive Loss, Net of                  
                Tax (Details)                                                    
84: R72         Segment Reporting and Geographic Information -      HTML     28K 
                Additional Information (Details)                                 
85: R73         Segment Reporting and Geographic Information -      HTML     49K 
                Schedule of Revenue from External Customers by                   
                Products and Services (Details)                                  
86: R74         Segment Reporting and Geographic Information -      HTML     52K 
                Schedule of Revenue from External Customers                      
                Attributed to Foreign Countries by Geographic Area               
                (Details)                                                        
87: R75         Segment Reporting and Geographic Information -      HTML     37K 
                Schedule of Revenue by Major Customer by Reporting               
                Segments (Details)                                               
88: R76         Share Repurchase Authorization - Textual (Details)  HTML     33K 
89: R77         Share Repurchase Authorization - Summary of Stock   HTML     34K 
                Repurchases (Details)                                            
91: XML         IDEA XML File -- Filing Summary                      XML    174K 
12: XML         XBRL Instance -- onto-10q_20200627_htm               XML   3.57M 
90: EXCEL       IDEA Workbook of Financial Reports                  XLSX     96K 
 8: EX-101.CAL  XBRL Calculations -- onto-20200627_cal               XML    212K 
 9: EX-101.DEF  XBRL Definitions -- onto-20200627_def                XML    385K 
10: EX-101.LAB  XBRL Labels -- onto-20200627_lab                     XML   1.07M 
11: EX-101.PRE  XBRL Presentations -- onto-20200627_pre              XML    798K 
 7: EX-101.SCH  XBRL Schema -- onto-20200627                         XSD    170K 
92: JSON        XBRL Instance as JSON Data -- MetaLinks              348±   559K 
93: ZIP         XBRL Zipped Folder -- 0001564590-20-036181-xbrl      Zip    214K

‘XML’   —   IDEA XML File — Filing Summary

This Document is an IDEA XML File.

                                                                                                                                                                                
<?xml version="1.0" encoding="windows-1252"?>
<FilingSummary>
<Version> 3.20.2 </Version>
<ProcessingTime/>
<ReportFormat> html </ReportFormat>
<ContextCount> 238 </ContextCount>
<ElementCount> 347 </ElementCount>
<EntityCount> 1 </EntityCount>
<FootnotesReported> false </FootnotesReported>
<SegmentCount> 62 </SegmentCount>
<ScenarioCount> 0 </ScenarioCount>
<TuplesReported> false </TuplesReported>
<UnitCount> 5 </UnitCount>
<MyReports>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R1.htm </HtmlFileName>
<LongName> 100000 - Document - Document and Entity Information Document </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DocumentDocumentAndEntityInformationDocument </Role>
<ShortName> Document and Entity Information Document </ShortName>
<MenuCategory> Cover </MenuCategory>
<Position> 1 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R2.htm </HtmlFileName>
<LongName> 100010 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (Unaudited) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/StatementCONDENSEDCONSOLIDATEDSTATEMENTSOFOPERATIONSUnaudited </Role>
<ShortName> CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (Unaudited) </ShortName>
<MenuCategory> Statements </MenuCategory>
<Position> 2 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R3.htm </HtmlFileName>
<LongName> 100020 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME (Unaudited) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/StatementCONDENSEDCONSOLIDATEDSTATEMENTSOFCOMPREHENSIVEINCOMEUnaudited </Role>
<ShortName> CONDENSED CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME (Unaudited) </ShortName>
<MenuCategory> Statements </MenuCategory>
<Position> 3 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R4.htm </HtmlFileName>
<LongName> 100030 - Statement - CONDENSED CONSOLIDATED BALANCE SHEETS (Unaudited) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/StatementCONDENSEDCONSOLIDATEDBALANCESHEETSUnaudited </Role>
<ShortName> CONDENSED CONSOLIDATED BALANCE SHEETS (Unaudited) </ShortName>
<MenuCategory> Statements </MenuCategory>
<Position> 4 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R5.htm </HtmlFileName>
<LongName> 100040 - Statement - CONDENSED CONSOLIDATED BALANCE SHEETS (Parenthetical) (Unaudited) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/StatementCONDENSEDCONSOLIDATEDBALANCESHEETSParentheticalUnaudited </Role>
<ShortName> CONDENSED CONSOLIDATED BALANCE SHEETS (Parenthetical) (Unaudited) </ShortName>
<MenuCategory> Statements </MenuCategory>
<Position> 5 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R6.htm </HtmlFileName>
<LongName> 100050 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS (Unaudited) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/StatementCONDENSEDCONSOLIDATEDSTATEMENTSOFCASHFLOWSUnaudited </Role>
<ShortName> CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS (Unaudited) </ShortName>
<MenuCategory> Statements </MenuCategory>
<Position> 6 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R7.htm </HtmlFileName>
<LongName> 100060 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF STOCKHOLDERS??? EQUITY (Unaudited) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/StatementCONDENSEDCONSOLIDATEDSTATEMENTSOFSTOCKHOLDERSEQUITYUnaudited </Role>
<ShortName> CONDENSED CONSOLIDATED STATEMENTS OF STOCKHOLDERS??? EQUITY (Unaudited) </ShortName>
<MenuCategory> Statements </MenuCategory>
<Position> 7 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R8.htm </HtmlFileName>
<LongName> 100070 - Disclosure - Basis of Presentation </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBasisOfPresentation </Role>
<ShortName> Basis of Presentation </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 8 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R9.htm </HtmlFileName>
<LongName> 100080 - Disclosure - Business Combination </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBusinessCombination </Role>
<ShortName> Business Combination </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 9 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R10.htm </HtmlFileName>
<LongName> 100090 - Disclosure - Fair Value Measurements </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureFairValueMeasurements </Role>
<ShortName> Fair Value Measurements </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 10 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R11.htm </HtmlFileName>
<LongName> 100100 - Disclosure - Marketable Securities </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureMarketableSecurities </Role>
<ShortName> Marketable Securities </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 11 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R12.htm </HtmlFileName>
<LongName> 100110 - Disclosure - Derivative Instruments and Hedging Activities </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivities </Role>
<ShortName> Derivative Instruments and Hedging Activities </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 12 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R13.htm </HtmlFileName>
<LongName> 100120 - Disclosure - Purchased Intangible Assets </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosurePurchasedIntangibleAssets </Role>
<ShortName> Purchased Intangible Assets </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 13 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R14.htm </HtmlFileName>
<LongName> 100130 - Disclosure - Convertible Notes Receivable </LongName>
<ReportType> Notes </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureConvertibleNotesReceivable </Role>
<ShortName> Convertible Notes Receivable </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 14 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R15.htm </HtmlFileName>
<LongName> 100140 - Disclosure - Balance Sheet Details </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBalanceSheetDetails </Role>
<ShortName> Balance Sheet Details </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 15 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R16.htm </HtmlFileName>
<LongName> 100150 - Disclosure - Commitments and Contingencies </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureCommitmentsAndContingencies </Role>
<ShortName> Commitments and Contingencies </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 16 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R17.htm </HtmlFileName>
<LongName> 100160 - Disclosure - Revenue </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureRevenue </Role>
<ShortName> Revenue </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 17 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R18.htm </HtmlFileName>
<LongName> 100170 - Disclosure - Share-Based Compensation </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureShareBasedCompensation </Role>
<ShortName> Share-Based Compensation </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 18 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R19.htm </HtmlFileName>
<LongName> 100180 - Disclosure - Other (Expense) Income, Net </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureOtherExpenseIncomeNet </Role>
<ShortName> Other (Expense) Income, Net </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 19 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R20.htm </HtmlFileName>
<LongName> 100190 - Disclosure - Income Taxes </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureIncomeTaxes </Role>
<ShortName> Income Taxes </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 20 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R21.htm </HtmlFileName>
<LongName> 100200 - Disclosure - Earnings Per Share </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureEarningsPerShare </Role>
<ShortName> Earnings Per Share </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 21 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R22.htm </HtmlFileName>
<LongName> 100210 - Disclosure - Accumulated Other Comprehensive Loss </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureAccumulatedOtherComprehensiveLoss </Role>
<ShortName> Accumulated Other Comprehensive Loss </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 22 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R23.htm </HtmlFileName>
<LongName> 100220 - Disclosure - Segment Reporting and Geographic Information </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureSegmentReportingAndGeographicInformation </Role>
<ShortName> Segment Reporting and Geographic Information </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 23 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R24.htm </HtmlFileName>
<LongName> 100230 - Disclosure - Share Repurchase Authorization </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureShareRepurchaseAuthorization </Role>
<ShortName> Share Repurchase Authorization </ShortName>
<MenuCategory> Notes </MenuCategory>
<Position> 24 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R25.htm </HtmlFileName>
<LongName> 100240 - Disclosure - Basis of Presentation (Policies) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBasisOfPresentationPolicies </Role>
<ShortName> Basis of Presentation (Policies) </ShortName>
<MenuCategory> Policies </MenuCategory>
<Position> 25 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R26.htm </HtmlFileName>
<LongName> 100250 - Disclosure - Business Combination (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBusinessCombinationTables </Role>
<ShortName> Business Combination (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBusinessCombination </ParentRole>
<Position> 26 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R27.htm </HtmlFileName>
<LongName> 100260 - Disclosure - Fair Value Measurements - (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureFairValueMeasurementsTables </Role>
<ShortName> Fair Value Measurements - (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureFairValueMeasurements </ParentRole>
<Position> 27 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R28.htm </HtmlFileName>
<LongName> 100270 - Disclosure - Marketable Securities - (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureMarketableSecuritiesTables </Role>
<ShortName> Marketable Securities - (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureMarketableSecurities </ParentRole>
<Position> 28 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R29.htm </HtmlFileName>
<LongName> 100280 - Disclosure - Derivative Instruments and Hedging Activities (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivitiesTables </Role>
<ShortName> Derivative Instruments and Hedging Activities (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivities </ParentRole>
<Position> 29 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R30.htm </HtmlFileName>
<LongName> 100290 - Disclosure - Purchased Intangible Assets - (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosurePurchasedIntangibleAssetsTables </Role>
<ShortName> Purchased Intangible Assets - (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosurePurchasedIntangibleAssets </ParentRole>
<Position> 30 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R31.htm </HtmlFileName>
<LongName> 100300 - Disclosure - Balance Sheet Details (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBalanceSheetDetailsTables </Role>
<ShortName> Balance Sheet Details (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBalanceSheetDetails </ParentRole>
<Position> 31 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R32.htm </HtmlFileName>
<LongName> 100310 - Disclosure - Commitments and Contingencies (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureCommitmentsAndContingenciesTables </Role>
<ShortName> Commitments and Contingencies (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureCommitmentsAndContingencies </ParentRole>
<Position> 32 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R33.htm </HtmlFileName>
<LongName> 100320 - Disclosure - Revenue (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureRevenueTables </Role>
<ShortName> Revenue (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureRevenue </ParentRole>
<Position> 33 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R34.htm </HtmlFileName>
<LongName> 100330 - Disclosure - Share-Based Compensation - (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureShareBasedCompensationTables </Role>
<ShortName> Share-Based Compensation - (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureShareBasedCompensation </ParentRole>
<Position> 34 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R35.htm </HtmlFileName>
<LongName> 100340 - Disclosure - Other (Expense) Income, Net (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureOtherExpenseIncomeNetTables </Role>
<ShortName> Other (Expense) Income, Net (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureOtherExpenseIncomeNet </ParentRole>
<Position> 35 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R36.htm </HtmlFileName>
<LongName> 100350 - Disclosure - Income Taxes - (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureIncomeTaxesTables </Role>
<ShortName> Income Taxes - (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureIncomeTaxes </ParentRole>
<Position> 36 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R37.htm </HtmlFileName>
<LongName> 100360 - Disclosure - Earnings Per Share - (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureEarningsPerShareTables </Role>
<ShortName> Earnings Per Share - (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureEarningsPerShare </ParentRole>
<Position> 37 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R38.htm </HtmlFileName>
<LongName> 100370 - Disclosure - Accumulated Other Comprehensive Loss (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureAccumulatedOtherComprehensiveLossTables </Role>
<ShortName> Accumulated Other Comprehensive Loss (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureAccumulatedOtherComprehensiveLoss </ParentRole>
<Position> 38 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R39.htm </HtmlFileName>
<LongName> 100380 - Disclosure - Segment Reporting and Geographic Information - (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationTables </Role>
<ShortName> Segment Reporting and Geographic Information - (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureSegmentReportingAndGeographicInformation </ParentRole>
<Position> 39 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R40.htm </HtmlFileName>
<LongName> 100390 - Disclosure - Share Repurchase Authorization (Tables) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureShareRepurchaseAuthorizationTables </Role>
<ShortName> Share Repurchase Authorization (Tables) </ShortName>
<MenuCategory> Tables </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureShareRepurchaseAuthorization </ParentRole>
<Position> 40 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R41.htm </HtmlFileName>
<LongName> 100400 - Disclosure - Business Combination - Textual (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBusinessCombinationTextualDetails </Role>
<ShortName> Business Combination - Textual (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 41 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R42.htm </HtmlFileName>
<LongName> 100410 - Disclosure - Business Combination - Summary of Preliminary Allocation of the Total Purchase Consideration to Initial Estimated Fair Values of the Assets Acquired and Liabilities Assumed (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBusinessCombinationSummaryOfPreliminaryAllocationOfTotalPurchaseConsiderationToInitialEstimatedFairValuesOfAssetsAcquiredAndLiabilitiesAssumedDetails </Role>
<ShortName> Business Combination - Summary of Preliminary Allocation of the Total Purchase Consideration to Initial Estimated Fair Values of the Assets Acquired and Liabilities Assumed (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 42 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R43.htm </HtmlFileName>
<LongName> 100420 - Disclosure - Fair Value Measurements - Schedule of Assets and Liabilities Carried at Fair Value Measured on a Recurring Basis (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureFairValueMeasurementsScheduleOfAssetsAndLiabilitiesCarriedAtFairValueMeasuredOnRecurringBasisDetails </Role>
<ShortName> Fair Value Measurements - Schedule of Assets and Liabilities Carried at Fair Value Measured on a Recurring Basis (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 43 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R44.htm </HtmlFileName>
<LongName> 100430 - Disclosure - Fair Value Measurements - Fair Value, Liabilities Measured on Recurring Basis, Unobservable Input Reconciliation (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureFairValueMeasurementsFairValueLiabilitiesMeasuredOnRecurringBasisUnobservableInputReconciliationDetails </Role>
<ShortName> Fair Value Measurements - Fair Value, Liabilities Measured on Recurring Basis, Unobservable Input Reconciliation (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 44 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R45.htm </HtmlFileName>
<LongName> 100440 - Disclosure - Marketable Securities - Schedule of Marketable Securities by Category (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureMarketableSecuritiesScheduleOfMarketableSecuritiesByCategoryDetails </Role>
<ShortName> Marketable Securities - Schedule of Marketable Securities by Category (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 45 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R46.htm </HtmlFileName>
<LongName> 100450 - Disclosure - Marketable Securities - Schedule of Amortized Cost and Estimated Fair Value of Marketable Securities Classified by Maturity Date (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureMarketableSecuritiesScheduleOfAmortizedCostAndEstimatedFairValueOfMarketableSecuritiesClassifiedByMaturityDateDetails </Role>
<ShortName> Marketable Securities - Schedule of Amortized Cost and Estimated Fair Value of Marketable Securities Classified by Maturity Date (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 46 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R47.htm </HtmlFileName>
<LongName> 100460 - Disclosure - Marketable Securities - Summary of Estimated Fair Value and Gross Unrealized Holding Losses of Marketable Securities in Unrealized Loss Position (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureMarketableSecuritiesSummaryOfEstimatedFairValueAndGrossUnrealizedHoldingLossesOfMarketableSecuritiesInUnrealizedLossPositionDetails </Role>
<ShortName> Marketable Securities - Summary of Estimated Fair Value and Gross Unrealized Holding Losses of Marketable Securities in Unrealized Loss Position (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 47 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R48.htm </HtmlFileName>
<LongName> 100470 - Disclosure - Derivative Instruments and Hedging Activities - Forward Contracts and Related Fair Values (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivitiesForwardContractsAndRelatedFairValuesDetails </Role>
<ShortName> Derivative Instruments and Hedging Activities - Forward Contracts and Related Fair Values (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 48 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R49.htm </HtmlFileName>
<LongName> 100480 - Disclosure - Purchased Intangible Assets - Changes in the Carrying Amount of Goodwill (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosurePurchasedIntangibleAssetsChangesInCarryingAmountOfGoodwillDetails </Role>
<ShortName> Purchased Intangible Assets - Changes in the Carrying Amount of Goodwill (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 49 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R50.htm </HtmlFileName>
<LongName> 100490 - Disclosure - Purchased Intangible Assets - Schedule of Purchased Intangible Assets (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosurePurchasedIntangibleAssetsScheduleOfPurchasedIntangibleAssetsDetails </Role>
<ShortName> Purchased Intangible Assets - Schedule of Purchased Intangible Assets (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 50 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R51.htm </HtmlFileName>
<LongName> 100500 - Disclosure - Purchased Intangible Assets - Textual (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosurePurchasedIntangibleAssetsTextualDetails </Role>
<ShortName> Purchased Intangible Assets - Textual (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 51 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R52.htm </HtmlFileName>
<LongName> 100510 - Disclosure - Convertible Notes Receivable - Textual (Details) </LongName>
<ReportType> Notes </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureConvertibleNotesReceivableTextualDetails </Role>
<ShortName> Convertible Notes Receivable - Textual (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 52 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R53.htm </HtmlFileName>
<LongName> 100520 - Disclosure - Balance Sheet Details - Schedule of Inventories (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfInventoriesDetails </Role>
<ShortName> Balance Sheet Details - Schedule of Inventories (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 53 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R54.htm </HtmlFileName>
<LongName> 100530 - Disclosure - Balance Sheet Details - Schedule of Property, Plant and Equipment, Net (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfPropertyPlantAndEquipmentNetDetails </Role>
<ShortName> Balance Sheet Details - Schedule of Property, Plant and Equipment, Net (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 54 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R55.htm </HtmlFileName>
<LongName> 100540 - Disclosure - Balance Sheet Details - Schedule of Other Assets (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherAssetsDetails </Role>
<ShortName> Balance Sheet Details - Schedule of Other Assets (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 55 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R56.htm </HtmlFileName>
<LongName> 100550 - Disclosure - Balance Sheet Details - Schedule of Other Assets (Parenthetical) (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherAssetsParentheticalDetails </Role>
<ShortName> Balance Sheet Details - Schedule of Other Assets (Parenthetical) (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 56 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R57.htm </HtmlFileName>
<LongName> 100560 - Disclosure - Balance Sheet Details - Schedule of Accrued Liabilities (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfAccruedLiabilitiesDetails </Role>
<ShortName> Balance Sheet Details - Schedule of Accrued Liabilities (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 57 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R58.htm </HtmlFileName>
<LongName> 100570 - Disclosure - Balance Sheet Details - Schedule of Other Current Liabilities (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherCurrentLiabilitiesDetails </Role>
<ShortName> Balance Sheet Details - Schedule of Other Current Liabilities (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 58 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R59.htm </HtmlFileName>
<LongName> 100580 - Disclosure - Balance Sheet Details - Schedule of Other Non-Current Liabilities (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherNonCurrentLiabilitiesDetails </Role>
<ShortName> Balance Sheet Details - Schedule of Other Non-Current Liabilities (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 59 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R60.htm </HtmlFileName>
<LongName> 100590 - Disclosure - Commitments and Contingencies - Textual (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureCommitmentsAndContingenciesTextualDetails </Role>
<ShortName> Commitments and Contingencies - Textual (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 60 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R61.htm </HtmlFileName>
<LongName> 100600 - Disclosure - Commitments and Contingencies - Schedule of Changes in Warranty Reserves (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureCommitmentsAndContingenciesScheduleOfChangesInWarrantyReservesDetails </Role>
<ShortName> Commitments and Contingencies - Schedule of Changes in Warranty Reserves (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 61 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R62.htm </HtmlFileName>
<LongName> 100610 - Disclosure - Revenue - Schedule of Disaggregation of Revenue by Timing of Revenue (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureRevenueScheduleOfDisaggregationOfRevenueByTimingOfRevenueDetails </Role>
<ShortName> Revenue - Schedule of Disaggregation of Revenue by Timing of Revenue (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 62 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R63.htm </HtmlFileName>
<LongName> 100620 - Disclosure - Revenue - Schedule of Changes in Deferred Revenue (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureRevenueScheduleOfChangesInDeferredRevenueDetails </Role>
<ShortName> Revenue - Schedule of Changes in Deferred Revenue (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 63 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R64.htm </HtmlFileName>
<LongName> 100630 - Disclosure - Share-Based Compensation - Summary of Restricted Stock Unit Activity (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureShareBasedCompensationSummaryOfRestrictedStockUnitActivityDetails </Role>
<ShortName> Share-Based Compensation - Summary of Restricted Stock Unit Activity (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 64 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R65.htm </HtmlFileName>
<LongName> 100640 - Disclosure - Share-Based Compensation - Textual (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureShareBasedCompensationTextualDetails </Role>
<ShortName> Share-Based Compensation - Textual (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 65 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R66.htm </HtmlFileName>
<LongName> 100650 - Disclosure - Other (Expense) Income, Net - Schedule of Other (Expense) Income, Net (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureOtherExpenseIncomeNetScheduleOfOtherExpenseIncomeNetDetails </Role>
<ShortName> Other (Expense) Income, Net - Schedule of Other (Expense) Income, Net (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<ParentRole> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureOtherExpenseIncomeNetTables </ParentRole>
<Position> 66 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R67.htm </HtmlFileName>
<LongName> 100660 - Disclosure - Income Taxes - Details of Income Tax (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureIncomeTaxesDetailsOfIncomeTaxDetails </Role>
<ShortName> Income Taxes - Details of Income Tax (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 67 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R68.htm </HtmlFileName>
<LongName> 100670 - Disclosure - Income Taxes - Textual (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureIncomeTaxesTextualDetails </Role>
<ShortName> Income Taxes - Textual (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 68 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R69.htm </HtmlFileName>
<LongName> 100680 - Disclosure - Earnings Per Share - Schedule of Weighted Average Number of Restricted Stock Units Excluded from Calculation of Diluted Earnings Per Share (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureEarningsPerShareScheduleOfWeightedAverageNumberOfRestrictedStockUnitsExcludedFromCalculationOfDilutedEarningsPerShareDetails </Role>
<ShortName> Earnings Per Share - Schedule of Weighted Average Number of Restricted Stock Units Excluded from Calculation of Diluted Earnings Per Share (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 69 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R70.htm </HtmlFileName>
<LongName> 100690 - Disclosure - Earnings Per Share - Schedule of Basic and Diluted Earnings Per Share (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureEarningsPerShareScheduleOfBasicAndDilutedEarningsPerShareDetails </Role>
<ShortName> Earnings Per Share - Schedule of Basic and Diluted Earnings Per Share (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 70 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R71.htm </HtmlFileName>
<LongName> 100700 - Disclosure - Accumulated Other Comprehensive Loss - Components of Accumulated Other Comprehensive Loss, Net of Tax (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureAccumulatedOtherComprehensiveLossComponentsOfAccumulatedOtherComprehensiveLossNetOfTaxDetails </Role>
<ShortName> Accumulated Other Comprehensive Loss - Components of Accumulated Other Comprehensive Loss, Net of Tax (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 71 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R72.htm </HtmlFileName>
<LongName> 100710 - Disclosure - Segment Reporting and Geographic Information - Additional Information (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationAdditionalInformationDetails </Role>
<ShortName> Segment Reporting and Geographic Information - Additional Information (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 72 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R73.htm </HtmlFileName>
<LongName> 100720 - Disclosure - Segment Reporting and Geographic Information - Schedule of Revenue from External Customers by Products and Services (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationScheduleOfRevenueFromExternalCustomersByProductsAndServicesDetails </Role>
<ShortName> Segment Reporting and Geographic Information - Schedule of Revenue from External Customers by Products and Services (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 73 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R74.htm </HtmlFileName>
<LongName> 100730 - Disclosure - Segment Reporting and Geographic Information - Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaDetails </Role>
<ShortName> Segment Reporting and Geographic Information - Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 74 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R75.htm </HtmlFileName>
<LongName> 100740 - Disclosure - Segment Reporting and Geographic Information - Schedule of Revenue by Major Customer by Reporting Segments (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationScheduleOfRevenueByMajorCustomerByReportingSegmentsDetails </Role>
<ShortName> Segment Reporting and Geographic Information - Schedule of Revenue by Major Customer by Reporting Segments (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 75 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R76.htm </HtmlFileName>
<LongName> 100750 - Disclosure - Share Repurchase Authorization - Textual (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureShareRepurchaseAuthorizationTextualDetails </Role>
<ShortName> Share Repurchase Authorization - Textual (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 76 </Position>
</Report>
<Report instance="onto-10q_20200627.htm">
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<HtmlFileName> R77.htm </HtmlFileName>
<LongName> 100760 - Disclosure - Share Repurchase Authorization - Summary of Stock Repurchases (Details) </LongName>
<ReportType> Sheet </ReportType>
<Role> http://www.ontoinnovation.com/20200627/taxonomy/role/DisclosureShareRepurchaseAuthorizationSummaryOfStockRepurchasesDetails </Role>
<ShortName> Share Repurchase Authorization - Summary of Stock Repurchases (Details) </ShortName>
<MenuCategory> Details </MenuCategory>
<Position> 77 </Position>
</Report>
<Report>
<IsDefault> false </IsDefault>
<HasEmbeddedReports> false </HasEmbeddedReports>
<LongName> All Reports </LongName>
<ReportType> Book </ReportType>
<ShortName> All Reports </ShortName>
</Report>
</MyReports>
<InputFiles>
<File doctype="10-Q" original="onto-10q_20200627.htm"> onto-10q_20200627.htm </File>
<File> onto-20200627.xsd </File>
<File> onto-20200627_cal.xml </File>
<File> onto-20200627_def.xml </File>
<File> onto-20200627_lab.xml </File>
<File> onto-20200627_pre.xml </File>
<File> onto-ex101_124.htm </File>
<File> onto-ex311_11.htm </File>
<File> onto-ex312_10.htm </File>
<File> onto-ex321_9.htm </File>
<File> onto-ex322_8.htm </File>
</InputFiles>
<SupplementalFiles/>
<BaseTaxonomies>
<BaseTaxonomy> http://xbrl.sec.gov/currency/2020-01-31 </BaseTaxonomy>
<BaseTaxonomy> http://xbrl.sec.gov/country/2020-01-31 </BaseTaxonomy>
<BaseTaxonomy> http://fasb.org/srt/2020-01-31 </BaseTaxonomy>
<BaseTaxonomy> http://xbrl.sec.gov/dei/2019-01-31 </BaseTaxonomy>
<BaseTaxonomy> http://fasb.org/us-gaap/2020-01-31 </BaseTaxonomy>
</BaseTaxonomies>
<HasPresentationLinkbase> true </HasPresentationLinkbase>
<HasCalculationLinkbase> true </HasCalculationLinkbase>
</FilingSummary>

3 Previous Filings that this Filing References

  As Of               Filer                 Filing    For·On·As Docs:Size             Issuer                      Filing Agent

 5/14/20  Onto Innovation Inc.              8-K:5,9     5/12/20   11:1.4M                                   ActiveDisclosure/FA
 1/27/20  Onto Innovation Inc.              8-K:5,9     1/22/20   11:444K                                   ActiveDisclosure/FA
10/28/19  Onto Innovation Inc.              8-K:2,3,5,710/25/19   17:666K                                   Donnelley … Solutions/FA
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