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| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_FieldServiceMember" xlink:label="loc_ivac_FieldServiceMember_321"/> |
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| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="loc_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_305"/> |
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| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_355" xlink:to="loc_dei_LegalEntityAxis_352" use="optional" order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_365"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_LegalEntityAxis_352" xlink:to="loc_dei_EntityDomain_365" use="optional" order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_357"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_355" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_357" use="optional" order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_356"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_357" xlink:to="loc_us-gaap_SegmentDomain_356" use="optional" order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_ThinfilmEquipmentSegmentMember" xlink:label="loc_ivac_ThinfilmEquipmentSegmentMember_371"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_356" xlink:to="loc_ivac_ThinfilmEquipmentSegmentMember_371" use="optional" order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_PhotonicsSegmentMember" xlink:label="loc_ivac_PhotonicsSegmentMember_372"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_356" xlink:to="loc_ivac_PhotonicsSegmentMember_372" use="optional" order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="loc_us-gaap_BalanceSheetLocationAxis_346"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_355" xlink:to="loc_us-gaap_BalanceSheetLocationAxis_346" use="optional" order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="loc_us-gaap_BalanceSheetLocationDomain_347"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationAxis_346" xlink:to="loc_us-gaap_BalanceSheetLocationDomain_347" use="optional" order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_DeferredRevenueMember" xlink:label="loc_ivac_DeferredRevenueMember_358"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationDomain_347" xlink:to="loc_ivac_DeferredRevenueMember_358" use="optional" order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_RetainageDepositMember" xlink:label="loc_ivac_RetainageDepositMember_359"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationDomain_347" xlink:to="loc_ivac_RetainageDepositMember_359" use="optional" order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_CustomerAdvancesMember" xlink:label="loc_ivac_CustomerAdvancesMember_360"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationDomain_347" xlink:to="loc_ivac_CustomerAdvancesMember_360" use="optional" order="12" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_AccountsNotesLoansAndFinancingReceivablesByBillingStatusTypeAxis" xlink:label="loc_us-gaap_AccountsNotesLoansAndFinancingReceivablesByBillingStatusTypeAxis_345"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_355" xlink:to="loc_us-gaap_AccountsNotesLoansAndFinancingReceivablesByBillingStatusTypeAxis_345" use="optional" order="13" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ReceivablesBillingStatusDomain" xlink:label="loc_us-gaap_ReceivablesBillingStatusDomain_353"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AccountsNotesLoansAndFinancingReceivablesByBillingStatusTypeAxis_345" xlink:to="loc_us-gaap_ReceivablesBillingStatusDomain_353" use="optional" order="14" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_UnbilledRevenuesMember" xlink:label="loc_us-gaap_UnbilledRevenuesMember_366"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ReceivablesBillingStatusDomain_353" xlink:to="loc_us-gaap_UnbilledRevenuesMember_366" use="optional" order="15" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_RevenueFromContractWithCustomersLineItems" xlink:label="loc_ivac_RevenueFromContractWithCustomersLineItems_354"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_355" xlink:to="loc_ivac_RevenueFromContractWithCustomersLineItems_354" use="optional" order="16" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ContractWithCustomerAssetNetAbstract" xlink:label="loc_us-gaap_ContractWithCustomerAssetNetAbstract_350"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersLineItems_354" xlink:to="loc_us-gaap_ContractWithCustomerAssetNetAbstract_350" use="optional" order="17" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ContractWithCustomerAssetNet" xlink:label="loc_us-gaap_ContractWithCustomerAssetNet_363"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ContractWithCustomerAssetNetAbstract_350" xlink:to="loc_us-gaap_ContractWithCustomerAssetNet_363" use="optional" order="18" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ContractWithCustomerLiabilityAbstract" xlink:label="loc_us-gaap_ContractWithCustomerLiabilityAbstract_351"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersLineItems_354" xlink:to="loc_us-gaap_ContractWithCustomerLiabilityAbstract_351" use="optional" order="19" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="loc_us-gaap_ContractWithCustomerLiability_364"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ContractWithCustomerLiabilityAbstract_351" xlink:to="loc_us-gaap_ContractWithCustomerLiability_364" use="optional" order="20" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ChangeInContractWithCustomerAssetAbstract" xlink:label="loc_us-gaap_ChangeInContractWithCustomerAssetAbstract_348"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersLineItems_354" xlink:to="loc_us-gaap_ChangeInContractWithCustomerAssetAbstract_348" use="optional" order="21" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ContractWithCustomerAssetCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress" xlink:label="loc_us-gaap_ContractWithCustomerAssetCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress_361"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ChangeInContractWithCustomerAssetAbstract_348" xlink:to="loc_us-gaap_ContractWithCustomerAssetCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress_361" use="optional" order="22" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:label="loc_us-gaap_ChangeInContractWithCustomerLiabilityAbstract_349"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersLineItems_354" xlink:to="loc_us-gaap_ChangeInContractWithCustomerLiabilityAbstract_349" use="optional" order="23" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ContractWithCustomerLiabilityCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress" xlink:label="loc_us-gaap_ContractWithCustomerLiabilityCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress_362"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ChangeInContractWithCustomerLiabilityAbstract_349" xlink:to="loc_us-gaap_ContractWithCustomerLiabilityCumulativeCatchUpAdjustmentToRevenueChangeInMeasureOfProgress_362" use="optional" order="24" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | </presentationLink> |
| <presentationLink xlink:type="extended" xlink:role="http://www.intevac.com/role/RevenueAdditionalInformationDetail"> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="loc_us-gaap_RevenueFromContractWithCustomerAbstract_374"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_RevenueFromContractWithCustomersTable" xlink:label="loc_ivac_RevenueFromContractWithCustomersTable_383"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RevenueFromContractWithCustomerAbstract_374" xlink:to="loc_ivac_RevenueFromContractWithCustomersTable_383" use="optional" order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_LegalEntityAxis" xlink:label="loc_dei_LegalEntityAxis_380"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_383" xlink:to="loc_dei_LegalEntityAxis_380" use="optional" order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_389"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_LegalEntityAxis_380" xlink:to="loc_dei_EntityDomain_389" use="optional" order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_385"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_383" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_385" use="optional" order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_384"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_385" xlink:to="loc_us-gaap_SegmentDomain_384" use="optional" order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_ThinfilmEquipmentSegmentMember" xlink:label="loc_ivac_ThinfilmEquipmentSegmentMember_397"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_384" xlink:to="loc_ivac_ThinfilmEquipmentSegmentMember_397" use="optional" order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_PhotonicsSegmentMember" xlink:label="loc_ivac_PhotonicsSegmentMember_398"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_384" xlink:to="loc_ivac_PhotonicsSegmentMember_398" use="optional" order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="loc_us-gaap_BalanceSheetLocationAxis_376"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_383" xlink:to="loc_us-gaap_BalanceSheetLocationAxis_376" use="optional" order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="loc_us-gaap_BalanceSheetLocationDomain_377"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationAxis_376" xlink:to="loc_us-gaap_BalanceSheetLocationDomain_377" use="optional" order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_CustomerAdvancesMember" xlink:label="loc_ivac_CustomerAdvancesMember_386"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationDomain_377" xlink:to="loc_ivac_CustomerAdvancesMember_386" use="optional" order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_DeferredRevenueMember" xlink:label="loc_ivac_DeferredRevenueMember_387"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationDomain_377" xlink:to="loc_ivac_DeferredRevenueMember_387" use="optional" order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_AccountsNotesLoansAndFinancingReceivablesByBillingStatusTypeAxis" xlink:label="loc_us-gaap_AccountsNotesLoansAndFinancingReceivablesByBillingStatusTypeAxis_375"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_383" xlink:to="loc_us-gaap_AccountsNotesLoansAndFinancingReceivablesByBillingStatusTypeAxis_375" use="optional" order="12" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ReceivablesBillingStatusDomain" xlink:label="loc_us-gaap_ReceivablesBillingStatusDomain_381"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AccountsNotesLoansAndFinancingReceivablesByBillingStatusTypeAxis_375" xlink:to="loc_us-gaap_ReceivablesBillingStatusDomain_381" use="optional" order="13" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_UnbilledRevenuesMember" xlink:label="loc_us-gaap_UnbilledRevenuesMember_390"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ReceivablesBillingStatusDomain_381" xlink:to="loc_us-gaap_UnbilledRevenuesMember_390" use="optional" order="14" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_379"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_383" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_379" use="optional" order="15" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_378"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_379" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_378" use="optional" order="16" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_RevenueFromContractWithCustomersLineItems" xlink:label="loc_ivac_RevenueFromContractWithCustomersLineItems_382"/> |
| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_ivac_RevenueFromContractWithCustomersTable_383" xlink:to="loc_ivac_RevenueFromContractWithCustomersLineItems_382" use="optional" order="17" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <loc xlink:type="locator" xlink:href="ivac-20190928.xsd#ivac_NotesReceivableNumberofInstallments" xlink:label="loc_ivac_NotesReceivableNumberofInstallments_391"/> |
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| | <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_465" xlink:to="loc_dei_LegalEntityAxis_464" use="optional" order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
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