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<!-- Generated by DFIN XBRL Instance Document - http://www.dfinsolutions.com/ - Version R3.0 - on 28-April-2020 [02:18:26] {PM} --> |
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| <link:definition> 1001 - Document - Cover Page </link:definition> |
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| <link:usedOn> link:definitionLink </link:usedOn> |
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| <link:definition> 1002 - Statement - CONDENSED CONSOLIDATED BALANCE SHEETS </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
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| | | <link:roleType roleURI="http://www.intevac.com/role/CondensedConsolidatedBalanceSheetsParenthetical" id="CondensedConsolidatedBalanceSheetsParenthetical"> |
| <link:definition> 1003 - Statement - CONDENSED CONSOLIDATED BALANCE SHEETS (Parenthetical) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
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| | | <link:roleType roleURI="http://www.intevac.com/role/CondensedConsolidatedStatementsOfIncome" id="CondensedConsolidatedStatementsOfIncome"> |
| <link:definition> 1004 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF INCOME </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
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| | | <link:roleType roleURI="http://www.intevac.com/role/CondensedConsolidatedStatementsOfComprehensiveIncomeLoss" id="CondensedConsolidatedStatementsOfComprehensiveIncomeLoss"> |
| <link:definition> 1005 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME (LOSS) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
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| | | <link:roleType roleURI="http://www.intevac.com/role/CondensedConsolidatedStatementsOfCashFlows" id="CondensedConsolidatedStatementsOfCashFlows"> |
| <link:definition> 1006 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
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| | | <link:roleType roleURI="http://www.intevac.com/role/DescriptionOfBusinessAndBasisOfPresentation" id="DescriptionOfBusinessAndBasisOfPresentation"> |
| <link:definition> 1007 - Disclosure - Description of Business and Basis of Presentation </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/Revenue" id="Revenue"> |
| <link:definition> 1008 - Disclosure - Revenue </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/Inventories" id="Inventories"> |
| <link:definition> 1009 - Disclosure - Inventories </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityBasedCompensation" id="EquityBasedCompensation"> |
| <link:definition> 1010 - Disclosure - Equity-Based Compensation </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/PurchasedIntangibleAssets" id="PurchasedIntangibleAssets"> |
| <link:definition> 1011 - Disclosure - Purchased Intangible Assets </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
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| | | <link:roleType roleURI="http://www.intevac.com/role/AcquisitionRelatedContingentConsideration" id="AcquisitionRelatedContingentConsideration"> |
| <link:definition> 1012 - Disclosure - Acquisition-Related Contingent Consideration </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/Warranty" id="Warranty"> |
| <link:definition> 1013 - Disclosure - Warranty </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/Guarantees" id="Guarantees"> |
| <link:definition> 1014 - Disclosure - Guarantees </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/CashCashEquivalentsAndInvestments" id="CashCashEquivalentsAndInvestments"> |
| <link:definition> 1015 - Disclosure - Cash, Cash Equivalents and Investments </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/DerivativeInstruments" id="DerivativeInstruments"> |
| <link:definition> 1016 - Disclosure - Derivative Instruments </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/Equity" id="Equity"> |
| <link:definition> 1017 - Disclosure - Equity </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/NetLossPerShare" id="NetLossPerShare"> |
| <link:definition> 1018 - Disclosure - Net Loss Per Share </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/SegmentReporting" id="SegmentReporting"> |
| <link:definition> 1019 - Disclosure - Segment Reporting </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/IncomeTaxes" id="IncomeTaxes"> |
| <link:definition> 1020 - Disclosure - Income Taxes </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/CommitmentsAndContingencies" id="CommitmentsAndContingencies"> |
| <link:definition> 1021 - Disclosure - Commitments and Contingencies </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/SubsequentEvents" id="SubsequentEvents"> |
| <link:definition> 1022 - Disclosure - Subsequent Events </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/RevenueTables" id="RevenueTables"> |
| <link:definition> 1023 - Disclosure - Revenue (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/InventoriesTables" id="InventoriesTables"> |
| <link:definition> 1024 - Disclosure - Inventories (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityBasedCompensationTables" id="EquityBasedCompensationTables"> |
| <link:definition> 1025 - Disclosure - Equity-Based Compensation (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/PurchasedIntangibleAssetsTables" id="PurchasedIntangibleAssetsTables"> |
| <link:definition> 1026 - Disclosure - Purchased Intangible Assets (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/AcquisitionRelatedContingentConsiderationTables" id="AcquisitionRelatedContingentConsiderationTables"> |
| <link:definition> 1027 - Disclosure - Acquisition-Related Contingent Consideration (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/WarrantyTables" id="WarrantyTables"> |
| <link:definition> 1028 - Disclosure - Warranty (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/CashCashEquivalentsAndInvestmentsTables" id="CashCashEquivalentsAndInvestmentsTables"> |
| <link:definition> 1029 - Disclosure - Cash, Cash Equivalents and Investments (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/DerivativeInstrumentsTables" id="DerivativeInstrumentsTables"> |
| <link:definition> 1030 - Disclosure - Derivative Instruments (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityTables" id="EquityTables"> |
| <link:definition> 1031 - Disclosure - Equity (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/NetLossPerShareTables" id="NetLossPerShareTables"> |
| <link:definition> 1032 - Disclosure - Net Loss Per Share (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/SegmentReportingTables" id="SegmentReportingTables"> |
| <link:definition> 1033 - Disclosure - Segment Reporting (Tables) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/RevenueDisaggregationOfRevenueFromContractsWithCustomersDetail" id="RevenueDisaggregationOfRevenueFromContractsWithCustomersDetail"> |
| <link:definition> 1034 - Disclosure - Revenue -Disaggregation of Revenue from Contracts with Customers (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/RevenuePrimaryGeographyMarketsDetail" id="RevenuePrimaryGeographyMarketsDetail"> |
| <link:definition> 1035 - Disclosure - Revenue - Primary Geography Markets (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/RevenueChangesInContractAssetsAndContractLiabilitiesDetail" id="RevenueChangesInContractAssetsAndContractLiabilitiesDetail"> |
| <link:definition> 1036 - Disclosure - Revenue - Changes in Contract Assets and Contract Liabilities (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/RevenueAdditionalInformationDetail" id="RevenueAdditionalInformationDetail"> |
| <link:definition> 1037 - Disclosure - Revenue - Additional Information (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/RevenueAdditionalInformationDetail1" id="RevenueAdditionalInformationDetail1"> |
| <link:definition> 1038 - Disclosure - Revenue - Additional Information (Detail 1) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityBasedCompensationAdditionalInformationDetail" id="EquityBasedCompensationAdditionalInformationDetail"> |
| <link:definition> 1039 - Disclosure - Equity-Based Compensation - Additional information (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityBasedCompensationEffectOfRecordingEquityBasedCompensationDetail" id="EquityBasedCompensationEffectOfRecordingEquityBasedCompensationDetail"> |
| <link:definition> 1040 - Disclosure - Equity-Based Compensation - Effect of Recording Equity-Based Compensation (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityBasedCompensationWeightedAverageFairValueOfStockOptionsAndEmployeeStockPurchaseRightsUsingWeightedAverageAssumptionsDetail" id="EquityBasedCompensationWeightedAverageFairValueOfStockOptionsAndEmployeeStockPurchaseRightsUsingWeightedAverageAssumptionsDetail"> |
| <link:definition> 1041 - Disclosure - Equity-Based Compensation - Weighted-Average Fair Value of Stock Options and Employee Stock Purchase Rights using Weighted-Average Assumptions (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityBasedCompensationOptionActivityAndChangesDetail" id="EquityBasedCompensationOptionActivityAndChangesDetail"> |
| <link:definition> 1042 - Disclosure - Equity-Based Compensation - Option Activity and Changes (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityBasedCompensationSummaryOfRestrictedStockUnitsActivityDetail" id="EquityBasedCompensationSummaryOfRestrictedStockUnitsActivityDetail"> |
| <link:definition> 1043 - Disclosure - Equity-Based Compensation - Summary of Restricted Stock Units Activity (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/InventoriesInventoriesStatedAtLowerOfAverageCostOrNetRealizableValueDetail" id="InventoriesInventoriesStatedAtLowerOfAverageCostOrNetRealizableValueDetail"> |
| <link:definition> 1044 - Disclosure - Inventories - Inventories Stated at Lower of Average Cost or Net Realizable Value (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/PurchasedIntangibleAssetsAdditionalInformationDetail" id="PurchasedIntangibleAssetsAdditionalInformationDetail"> |
| <link:definition> 1045 - Disclosure - Purchased Intangible Assets - Additional Information (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/PurchasedIntangibleAssetsDetailsOfFiniteLivedIntangibleAssetsBySegmentDetail" id="PurchasedIntangibleAssetsDetailsOfFiniteLivedIntangibleAssetsBySegmentDetail"> |
| <link:definition> 1046 - Disclosure - Purchased Intangible Assets - Details of Finite-lived Intangible Assets by Segment (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/PurchasedIntangibleAssetsFutureAmortizationExpenseDetail" id="PurchasedIntangibleAssetsFutureAmortizationExpenseDetail"> |
| <link:definition> 1047 - Disclosure - Purchased Intangible Assets - Future Amortization Expense (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/AcquisitionRelatedContingentConsiderationAdditionalInformationDetail" id="AcquisitionRelatedContingentConsiderationAdditionalInformationDetail"> |
| <link:definition> 1048 - Disclosure - Acquisition-Related Contingent Consideration - Additional Information (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/AcquisitionRelatedContingentConsiderationReconciliationOfChangeInFairValueMeasurementOfContingentConsiderationLiabilityDetail" id="AcquisitionRelatedContingentConsiderationReconciliationOfChangeInFairValueMeasurementOfContingentConsiderationLiabilityDetail"> |
| <link:definition> 1049 - Disclosure - Acquisition-Related Contingent Consideration - Reconciliation of Change in Fair Value Measurement of Contingent Consideration Liability (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/WarrantyAdditionalInformationDetail" id="WarrantyAdditionalInformationDetail"> |
| <link:definition> 1050 - Disclosure - Warranty - Additional Information (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/WarrantyBalanceSheetClassificationOfWarrantyProvisionAccountDetail" id="WarrantyBalanceSheetClassificationOfWarrantyProvisionAccountDetail"> |
| <link:definition> 1051 - Disclosure - Warranty - Balance Sheet Classification of Warranty Provision Account (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/GuaranteesAdditionalInformationDetail" id="GuaranteesAdditionalInformationDetail"> |
| <link:definition> 1052 - Disclosure - Guarantees - Additional Information (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/CashCashEquivalentsAndInvestmentsCashCashEquivalentsAndShortTermInvestmentsAndLongTermInvestmentsDetail" id="CashCashEquivalentsAndInvestmentsCashCashEquivalentsAndShortTermInvestmentsAndLongTermInvestmentsDetail"> |
| <link:definition> 1053 - Disclosure - Cash, Cash Equivalents and Investments - Cash, Cash Equivalents and Short-Term Investments and Long-Term Investments (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/CashCashEquivalentsAndInvestmentsContractualMaturitiesOfAvailableForSaleSecuritiesDetail" id="CashCashEquivalentsAndInvestmentsContractualMaturitiesOfAvailableForSaleSecuritiesDetail"> |
| <link:definition> 1054 - Disclosure - Cash, Cash Equivalents and Investments - Contractual Maturities of Available-For-Sale Securities (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/CashCashEquivalentsAndInvestmentsFairMarketValueOfInvestmentsWithUnrealizedLossesNotDeemedToBeOtherThanTemporarilyImpairedDetail" id="CashCashEquivalentsAndInvestmentsFairMarketValueOfInvestmentsWithUnrealizedLossesNotDeemedToBeOtherThanTemporarilyImpairedDetail"> |
| <link:definition> 1055 - Disclosure - Cash, Cash Equivalents and Investments - Fair Market Value of Investments with Unrealized Losses Not Deemed to be Other-Than Temporarily Impaired (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/CashCashEquivalentsAndInvestmentsFairValueHierarchyOfAvailableForSaleSecuritiesMeasuredAtFairValueOnRecurringBasisDetail" id="CashCashEquivalentsAndInvestmentsFairValueHierarchyOfAvailableForSaleSecuritiesMeasuredAtFairValueOnRecurringBasisDetail"> |
| <link:definition> 1056 - Disclosure - Cash, Cash Equivalents and Investments - Fair Value Hierarchy of Available-for-Sale Securities Measured at Fair Value on Recurring Basis (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/DerivativeInstrumentsAdditionalInformationDetail" id="DerivativeInstrumentsAdditionalInformationDetail"> |
| <link:definition> 1057 - Disclosure - Derivative Instruments - Additional Information (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/DerivativeInstrumentsSummaryOfOutstandingDerivativeInstrumentsOnGrossBasisAsRecordedInConsolidatedBalanceSheetsDetail" id="DerivativeInstrumentsSummaryOfOutstandingDerivativeInstrumentsOnGrossBasisAsRecordedInConsolidatedBalanceSheetsDetail"> |
| <link:definition> 1058 - Disclosure - Derivative Instruments - Summary of Outstanding Derivative Instruments on Gross Basis as Recorded in Consolidated Balance Sheets (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityScheduleOfChangesInStockholdersEquityDetail" id="EquityScheduleOfChangesInStockholdersEquityDetail"> |
| <link:definition> 1059 - Disclosure - Equity - Schedule of Changes in Stockholders' Equity (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityChangesInAccumulatedOtherComprehensiveIncomeByComponentDetail" id="EquityChangesInAccumulatedOtherComprehensiveIncomeByComponentDetail"> |
| <link:definition> 1060 - Disclosure - Equity - Changes in Accumulated Other Comprehensive Income by Component (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityAdditionalInformationDetail" id="EquityAdditionalInformationDetail"> |
| <link:definition> 1061 - Disclosure - Equity - Additional Information (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/EquityScheduleOfStockRepurchasesDetail" id="EquityScheduleOfStockRepurchasesDetail"> |
| <link:definition> 1062 - Disclosure - Equity - Schedule of Stock Repurchases (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/NetLossPerShareComputationOfBasicAndDilutedNetIncomePerShareDetail" id="NetLossPerShareComputationOfBasicAndDilutedNetIncomePerShareDetail"> |
| <link:definition> 1063 - Disclosure - Net Loss Per Share - Computation of Basic and Diluted Net Income Per Share (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/IncomeTaxesAdditionalInformationDetail" id="IncomeTaxesAdditionalInformationDetail"> |
| <link:definition> 1064 - Disclosure - Income Taxes - Additional Information (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/WarrantyActivityInWarrantyProvisionAccountDetail" id="WarrantyActivityInWarrantyProvisionAccountDetail"> |
| <link:definition> 1065 - Disclosure - Warranty - Activity in Warranty Provision Account (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/SegmentReportingAdditionalInformationDetail" id="SegmentReportingAdditionalInformationDetail"> |
| <link:definition> 1066 - Disclosure - Segment Reporting - Additional Information (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/SegmentReportingInformationForEachReportableSegmentDetail" id="SegmentReportingInformationForEachReportableSegmentDetail"> |
| <link:definition> 1067 - Disclosure - Segment Reporting - Information for Each Reportable Segment (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/SegmentReportingAssetsForEachReportableSegmentDetail" id="SegmentReportingAssetsForEachReportableSegmentDetail"> |
| <link:definition> 1068 - Disclosure - Segment Reporting - Assets for Each Reportable Segment (Detail) </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:roleType roleURI="http://www.intevac.com/role/RevenueAdditionalInformationDetail1Alternate" id="RevenueAdditionalInformationDetail1Alternate"> |
| <link:definition> 1069 - Disclosure - Revenue - Additional Information (Detail 1) Alternate </link:definition> |
| <link:usedOn> link:presentationLink </link:usedOn> |
| <link:usedOn> link:definitionLink </link:usedOn> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| </link:roleType> |
| | | <link:linkbaseRef xlink:type="simple" xlink:href="ivac-20200331_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase"/> |
| | | <link:linkbaseRef xlink:type="simple" xlink:href="ivac-20200331_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase"/> |
| | | <link:linkbaseRef xlink:type="simple" xlink:href="ivac-20200331_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase"/> |
| | | <link:linkbaseRef xlink:type="simple" xlink:href="ivac-20200331_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase"/> |
| | | </appinfo> |
| | </annotation> |
| <import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd"/> |
| <import namespace="http://www.xbrl.org/2003/linkbase" schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd"/> |
| <import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd"/> |
| <import namespace="http://fasb.org/us-gaap/2019-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2019/elts/us-gaap-2019-01-31.xsd"/> |
| <import namespace="http://xbrl.sec.gov/country/2017-01-31" schemaLocation="https://xbrl.sec.gov/country/2017/country-2017-01-31.xsd"/> |
| <import namespace="http://xbrl.sec.gov/currency/2019-01-31" schemaLocation="https://xbrl.sec.gov/currency/2019/currency-2019-01-31.xsd"/> |
| <import namespace="http://xbrl.sec.gov/exch/2019-01-31" schemaLocation="https://xbrl.sec.gov/exch/2019/exch-2019-01-31.xsd"/> |
| <import namespace="http://xbrl.sec.gov/naics/2017-01-31" schemaLocation="http://xbrl.sec.gov/naics/2017/naics-2017-01-31.xsd"/> |
| <import namespace="http://xbrl.sec.gov/sic/2011-01-31" schemaLocation="http://xbrl.sec.gov/sic/2011/sic-2011-01-31.xsd"/> |
| <import namespace="http://xbrl.sec.gov/stpr/2018-01-31" schemaLocation="https://xbrl.sec.gov/stpr/2018/stpr-2018-01-31.xsd"/> |
| <import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd"/> |
| <import namespace="http://www.xbrl.org/2009/role/net" schemaLocation="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd"/> |
| <import namespace="http://www.xbrl.org/2009/arcrole/fact-explanatoryFact" schemaLocation="http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd"/> |
| <import namespace="http://xbrl.sec.gov/dei/2019-01-31" schemaLocation="https://xbrl.sec.gov/dei/2019/dei-2019-01-31.xsd"/> |
| <import namespace="http://www.xbrl.org/dtr/type/numeric" schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd"/> |
| <import namespace="http://www.xbrl.org/dtr/type/non-numeric" schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd"/> |
| <import namespace="http://fasb.org/us-types/2019-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2019/elts/us-types-2019-01-31.xsd"/> |
| <import namespace="http://fasb.org/srt/2019-01-31" schemaLocation="http://xbrl.fasb.org/srt/2019/elts/srt-2019-01-31.xsd"/> |
| <import namespace="http://fasb.org/srt-types/2019-01-31" schemaLocation="http://xbrl.fasb.org/srt/2019/elts/srt-types-2019-01-31.xsd"/> |
| <element name="SystemsAndComponentsMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_SystemsAndComponentsMember" substitutionGroup="xbrli:item"/> |
| <element name="TechnologyDevelopmentMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_TechnologyDevelopmentMember" substitutionGroup="xbrli:item"/> |
| <element name="PaymentOfAcquisitionRelatedContingentConsideration" type="xbrli:monetaryItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_PaymentOfAcquisitionRelatedContingentConsideration" substitutionGroup="xbrli:item" xbrli:balance="credit"/> |
| <element name="StraightLineRentAdjustmentsAndAmortizationOfLeaseIncentives" type="xbrli:monetaryItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_StraightLineRentAdjustmentsAndAmortizationOfLeaseIncentives" substitutionGroup="xbrli:item" xbrli:balance="debit"/> |
| <element name="ScheduleOfIntangibleAssetsByMajorClassTextBlock" type="nonnum:textBlockItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_ScheduleOfIntangibleAssetsByMajorClassTextBlock" substitutionGroup="xbrli:item"/> |
| <element name="CommercialProductsMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_CommercialProductsMember" substitutionGroup="xbrli:item"/> |
| <element name="CostPlusFixedFeeMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_CostPlusFixedFeeMember" substitutionGroup="xbrli:item"/> |
| <element name="DisplayCoverPanelMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_DisplayCoverPanelMember" substitutionGroup="xbrli:item"/> |
| <element name="FirmFixedPriceMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_FirmFixedPriceMember" substitutionGroup="xbrli:item"/> |
| <element name="HardDiskDriveMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_HardDiskDriveMember" substitutionGroup="xbrli:item"/> |
| <element name="MilitaryProductsMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_MilitaryProductsMember" substitutionGroup="xbrli:item"/> |
| <element name="PhotovoltaicMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_PhotovoltaicMember" substitutionGroup="xbrli:item"/> |
| <element name="RepairAndOtherServicesMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_RepairAndOtherServicesMember" substitutionGroup="xbrli:item"/> |
| <element name="TechnologyAndDevelopmentMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_TechnologyAndDevelopmentMember" substitutionGroup="xbrli:item"/> |
| <element name="TimesAndMaterialsMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_TimesAndMaterialsMember" substitutionGroup="xbrli:item"/> |
| <element name="PhotonicsSegmentMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_PhotonicsSegmentMember" substitutionGroup="xbrli:item"/> |
| <element name="ThinfilmEquipmentSegmentMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_ThinfilmEquipmentSegmentMember" substitutionGroup="xbrli:item"/> |
| <element name="FieldServiceMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_FieldServiceMember" substitutionGroup="xbrli:item"/> |
| <element name="SystemUpgradeAndSparePartsMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_SystemUpgradeAndSparePartsMember" substitutionGroup="xbrli:item"/> |
| <element name="RevenueFromContractWithCustomersTable" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_RevenueFromContractWithCustomersTable" substitutionGroup="xbrldt:hypercubeItem"/> |
| <element name="CustomerAdvancesMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_CustomerAdvancesMember" substitutionGroup="xbrli:item"/> |
| <element name="DeferredRevenueMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_DeferredRevenueMember" substitutionGroup="xbrli:item"/> |
| <element name="RetainageDepositMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_RetainageDepositMember" substitutionGroup="xbrli:item"/> |
| <element name="RevenueFromContractWithCustomersLineItems" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_RevenueFromContractWithCustomersLineItems" substitutionGroup="xbrli:item"/> |
| <element name="NotesReceivableNumberofInstallments" type="xbrli:integerItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_NotesReceivableNumberofInstallments" substitutionGroup="xbrli:item"/> |
| <element name="MaximumEmployeeSalaryWithholdingsForPurchaseOfCommonStockUnderTermsOfEspp" type="num:percentItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_MaximumEmployeeSalaryWithholdingsForPurchaseOfCommonStockUnderTermsOfEspp" substitutionGroup="xbrli:item"/> |
| <element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOfferingPeriod" type="xbrli:durationItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOfferingPeriod" substitutionGroup="xbrli:item"/> |
| <element name="EmployeeStockPurchasePlanMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_EmployeeStockPurchasePlanMember" substitutionGroup="xbrli:item"/> |
| <element name="StockPurchaseRightsMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_StockPurchaseRightsMember" substitutionGroup="xbrli:item"/> |
| <element name="SolarImplantTechnologiesMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_SolarImplantTechnologiesMember" substitutionGroup="xbrli:item"/> |
| <element name="RevenueEarnoutMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_RevenueEarnoutMember" substitutionGroup="xbrli:item"/> |
| <element name="MinimumProductWarrantyRange" type="xbrli:durationItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_MinimumProductWarrantyRange" substitutionGroup="xbrli:item"/> |
| <element name="MaximumProductWarrantyRange" type="xbrli:durationItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_MaximumProductWarrantyRange" substitutionGroup="xbrli:item"/> |
| <element name="CommonStockAndAdditionalPaidInCapitalMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_CommonStockAndAdditionalPaidInCapitalMember" substitutionGroup="xbrli:item"/> |
| <element name="AccumulatedDeficitMember" type="nonnum:domainItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_AccumulatedDeficitMember" substitutionGroup="xbrli:item"/> |
| <element name="StockRepurchaseProgramAcquiredAuthorizedAmount" type="xbrli:monetaryItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_StockRepurchaseProgramAcquiredAuthorizedAmount" substitutionGroup="xbrli:item" xbrli:balance="debit"/> |
| <element name="IncomeTaxesTable" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_IncomeTaxesTable" substitutionGroup="xbrldt:hypercubeItem"/> |
| <element name="IncomeTaxesLineItems" type="xbrli:stringItemType" abstract="true" xbrli:periodType="duration" nillable="true" id="ivac_IncomeTaxesLineItems" substitutionGroup="xbrli:item"/> |
| <element name="AllocationOfCorporateExpensesToSegments" type="num:percentItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_AllocationOfCorporateExpensesToSegments" substitutionGroup="xbrli:item"/> |
| <element name="UnallocatedCosts" type="xbrli:monetaryItemType" abstract="false" xbrli:periodType="duration" nillable="true" id="ivac_UnallocatedCosts" substitutionGroup="xbrli:item" xbrli:balance="debit"/> |
| <element name="CommonPropertyPlantAndEquipment" type="xbrli:monetaryItemType" abstract="false" xbrli:periodType="instant" nillable="true" id="ivac_CommonPropertyPlantAndEquipment" substitutionGroup="xbrli:item" xbrli:balance="debit"/> |
| <element name="CommonOperatingLeaseRightOfUseAssets" type="xbrli:monetaryItemType" abstract="false" xbrli:periodType="instant" nillable="true" id="ivac_CommonOperatingLeaseRightOfUseAssets" substitutionGroup="xbrli:item" xbrli:balance="debit"/> |
| </schema> |