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As Of Filer Filing For·On·As Docs:Size Issuer Filing Agent 5/17/22 Onto Innovation Inc. 8-K:5,7,9 5/17/22 12:230K ActiveDisclosure/FA |
Document/Exhibit Description Pages Size 1: 8-K Current Report HTML 33K 2: EX-10.1 Material Contract HTML 23K 3: EX-99.1 Miscellaneous Exhibit HTML 16K 7: R1 Document and Entity Information HTML 46K 10: XML IDEA XML File -- Filing Summary XML 12K 8: XML XBRL Instance -- onto-8k_20220517_htm XML 14K 9: EXCEL IDEA Workbook of Financial Reports XLSX 6K 5: EX-101.LAB XBRL Labels -- onto-20220517_lab XML 56K 6: EX-101.PRE XBRL Presentations -- onto-20220517_pre XML 34K 4: EX-101.SCH XBRL Schema -- onto-20220517 XSD 18K 11: JSON XBRL Instance as JSON Data -- MetaLinks 12± 19K 12: ZIP XBRL Zipped Folder -- 0001564590-22-020477-xbrl Zip 19K
Original SGML Text submitted by: | ActiveDisclosure/FA (as Filing Agent) |
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