As Of	Filer	Filing¹	For·On·As	Docs:Size	Issuer		Filing Agent

  5/9/24  Onto Innovation Inc.              10-Q        3/30/24   81:7M                                     Donnelley … Solutions/FA 
  5/9/24  Onto Innovation Inc.              8-K:2,9      5/9/24    9:464K                                   Donnelley … Solutions/FA 
  4/5/24  Onto Innovation Inc.              ARS         3/30/24    1:3.9M                                   Donnelley … Solutions/FA 
  4/5/24  Onto Innovation Inc.              DEFA14A                1:1.2M                                   Donnelley … Solutions/FA 
  4/5/24  Onto Innovation Inc.              DEF 14A      4/5/24    8:13M                                    Donnelley … Solutions/FA 
  4/3/24  Vedula Srinivas                   4          Officer²    1:4K   Onto Innovation Inc.              Tomlinson Debora B/FA    
 3/22/24  Plisinski Michael P               4          Dir.,Off.²  1:12K  Onto Innovation Inc.              Tomlinson Debora B/FA    
 3/20/24  Plisinski Michael P               144                    1:7K   Onto Innovation Inc.              Fidelity Brokera… LLC/FA 
 3/18/24  OH Yoon Ah                        144                    1:5K   Onto Innovation Inc.              Morgan Stanley … Svcs/FA 
 3/18/24  Lynch Susan D                     3          Director²   2:8K   Onto Innovation Inc.              Tomlinson Debora B/FA    
 3/18/24  OH Yoon Ah                        4          Officer²    1:5K   Onto Innovation Inc.              Tomlinson Debora B/FA    
 3/18/24  Onto Innovation Inc.              8-K:5       3/15/24    9:171K                                   Donnelley … Solutions/FA 
 3/15/24  OH Yoon Ah                        144                    1:5K   Onto Innovation Inc.              Morgan Stanley … Svcs/FA 
  3/5/24  Yaldaei Ramil                     4          Officer²    1:8K   Onto Innovation Inc.              Tomlinson Debora B/FA    
  3/5/24  Vedula Srinivas                   4          Officer²    1:8K   Onto Innovation Inc.              Tomlinson Debora B/FA    
  3/5/24  Slicer Mark                       4          Officer²    1:7K   Onto Innovation Inc.              Tomlinson Debora B/FA    
  3/5/24  Plisinski Michael P               4          Dir.,Off.²  1:8K   Onto Innovation Inc.              Tomlinson Debora B/FA    
  3/5/24  Fiordalice Robert                 4          Officer²    1:8K   Onto Innovation Inc.              Tomlinson Debora B/FA    
  3/5/24  OH Yoon Ah                        4          Officer²    1:7K   Onto Innovation Inc.              Tomlinson Debora B/FA    
  3/5/24  Brooks D Mayson                   4          Officer²    1:8K   Onto Innovation Inc.              Tomlinson Debora B/FA    

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¹	Filing/Form Types:
	3	Initial Statement of Beneficial Ownership of Securities by an Insider — Form 3 { The Filer is an Insider² of the Issuer }.
	4	Statement of Changes in Beneficial Ownership of Securities by an Insider — Form 4 { The Filer is an Insider² of the Issuer }.
	8-K	Current Report — Form 8-K { Item 1: Business & Operations;  2: Financial Info;  3: Securities & Trading;  4: Accountants & Accounting;  5: Governance & Management;  6: Asset-Backed Securities;  7: Disclosures;  8: Events;  9: Financials }.
	10-Q	Quarterly Report — Form 10-Q.
	144	Notice of a Proposed Sale of Securities by an Insider — Form 144 { The Filer is an Insider² of the Issuer }.
	ARS	Annual Report to Security Holders.
	DEF 14A	Definitive Proxy Statement — Schedule 14A.
	DEFA14A	Definitive Additional Proxy Soliciting Material — Schedule 14A.
²	Insider:  The Filer is a Director, Officer, 10% Owner and/or Other “insider” of the Issuer.