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| <link:definition> 100400 - Disclosure - Marketable Securities - Schedule of Amortized Cost and Estimated Fair Value of Marketable Securities Classified by Maturity Date (Details) </link:definition> |
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| <link:definition> 100410 - Disclosure - Marketable Securities - Summary of Estimated Fair Value and Gross Unrealized Holding Losses of Marketable Securities in Unrealized Loss Position (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivitiesForwardContractsAndRelatedFairValuesDetails" id="Role_DisclosureDerivativeInstrumentsAndHedgingActivitiesForwardContractsAndRelatedFairValuesDetails"> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosurePurchasedIntangibleAssetsScheduleOfPurchasedIntangibleAssetsDetails" id="Role_DisclosurePurchasedIntangibleAssetsScheduleOfPurchasedIntangibleAssetsDetails"> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosurePurchasedIntangibleAssetsScheduleOfEstimatedFutureAmortizationExpensesDetails" id="Role_DisclosurePurchasedIntangibleAssetsScheduleOfEstimatedFutureAmortizationExpensesDetails"> |
| <link:definition> 100440 - Disclosure - Purchased Intangible Assets - Schedule of Estimated Future Amortization Expenses (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfInventoriesDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfInventoriesDetails"> |
| <link:definition> 100450 - Disclosure - Balance Sheet Details - Schedule of Inventories (Details) </link:definition> |
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| <link:usedOn> link:presentationLink </link:usedOn> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfPropertyPlantAndEquipmentNetDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfPropertyPlantAndEquipmentNetDetails"> |
| <link:definition> 100460 - Disclosure - Balance Sheet Details - Schedule of Property, Plant and Equipment, Net (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherAssetsDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfOtherAssetsDetails"> |
| <link:definition> 100470 - Disclosure - Balance Sheet Details - Schedule of Other Assets (Details) </link:definition> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| <link:usedOn> link:presentationLink </link:usedOn> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfAccruedLiabilitiesDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfAccruedLiabilitiesDetails"> |
| <link:definition> 100480 - Disclosure - Balance Sheet Details - Schedule of Accrued Liabilities (Details) </link:definition> |
| <link:usedOn> link:calculationLink </link:usedOn> |
| <link:usedOn> link:presentationLink </link:usedOn> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherCurrentLiabilitiesDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfOtherCurrentLiabilitiesDetails"> |
| <link:definition> 100490 - Disclosure - Balance Sheet Details - Schedule of Other Current Liabilities (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherNonCurrentLiabilitiesDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfOtherNonCurrentLiabilitiesDetails"> |
| <link:definition> 100500 - Disclosure - Balance Sheet Details - Schedule of Other Non-Current Liabilities (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureCommitmentsAndContingenciesTextualDetails" id="Role_DisclosureCommitmentsAndContingenciesTextualDetails"> |
| <link:definition> 100510 - Disclosure - Commitments and Contingencies - Textual (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureCommitmentsAndContingenciesScheduleOfChangesInWarrantyReservesDetails" id="Role_DisclosureCommitmentsAndContingenciesScheduleOfChangesInWarrantyReservesDetails"> |
| <link:definition> 100520 - Disclosure - Commitments and Contingencies - Schedule of Changes in Warranty Reserves (Details) </link:definition> |
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| <link:usedOn> link:presentationLink </link:usedOn> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureRevenueScheduleOfDisaggregationOfRevenueByTimingOfRevenueDetails" id="Role_DisclosureRevenueScheduleOfDisaggregationOfRevenueByTimingOfRevenueDetails"> |
| <link:definition> 100530 - Disclosure - Revenue - Schedule of Disaggregation of Revenue by Timing of Revenue (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureRevenueAdditionalInformationDetails" id="Role_DisclosureRevenueAdditionalInformationDetails"> |
| <link:definition> 100540 - Disclosure - Revenue - Additional Information (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureRevenueScheduleOfChangesInDeferredRevenueDetails" id="Role_DisclosureRevenueScheduleOfChangesInDeferredRevenueDetails"> |
| <link:definition> 100550 - Disclosure - Revenue - Schedule of Changes in Deferred Revenue (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureShareBasedCompensationSummaryOfRestrictedStockUnitActivityDetails" id="Role_DisclosureShareBasedCompensationSummaryOfRestrictedStockUnitActivityDetails"> |
| <link:definition> 100560 - Disclosure - Share-Based Compensation - Summary of Restricted Stock Unit Activity (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureShareBasedCompensationTextualDetails" id="Role_DisclosureShareBasedCompensationTextualDetails"> |
| <link:definition> 100570 - Disclosure - Share-Based Compensation - Textual (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureOtherExpenseNetScheduleOfOtherExpenseNetDetails" id="Role_DisclosureOtherExpenseNetScheduleOfOtherExpenseNetDetails"> |
| <link:definition> 100580 - Disclosure - Other Expense, Net - Schedule of Other Expense, Net (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureIncomeTaxesDetailsOfIncomeTaxDetails" id="Role_DisclosureIncomeTaxesDetailsOfIncomeTaxDetails"> |
| <link:definition> 100590 - Disclosure - Income Taxes - Details of Income Tax (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureIncomeTaxesTextualDetails" id="Role_DisclosureIncomeTaxesTextualDetails"> |
| <link:definition> 100600 - Disclosure - Income Taxes - Textual (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureEarningsPerShareScheduleOfBasicAndDilutedEarningsPerShareDetails" id="Role_DisclosureEarningsPerShareScheduleOfBasicAndDilutedEarningsPerShareDetails"> |
| <link:definition> 100610 - Disclosure - Earnings Per Share - Schedule of Basic and Diluted Earnings Per Share (Details) </link:definition> |
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| <link:definition> 100620 - Disclosure - Accumulated Other Comprehensive Income (Loss) - Components of Accumulated Other Comprehensive Loss, Net of Tax (Details) </link:definition> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationAdditionalInformationDetails" id="Role_DisclosureSegmentReportingAndGeographicInformationAdditionalInformationDetails"> |
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| | | <link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureShareRepurchaseAuthorizationTextualDetails" id="Role_DisclosureShareRepurchaseAuthorizationTextualDetails"> |
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| | | </xsd:appinfo> |
| | </xsd:annotation> |
| <xsd:element id="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsAmortizedCost" name="AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsAmortizedCost" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/> |
| <xsd:element id="onto_EarningsPerSharesBasicAndDilutedAbstract" name="EarningsPerSharesBasicAndDilutedAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_AcquiredInventoryStepUpAmortization" name="AcquiredInventoryStepUpAmortization" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/> |
| <xsd:element id="onto_ProvisionForInventoryValuation" name="ProvisionForInventoryValuation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/> |
| <xsd:element id="onto_AdjustmentsToAdditionalPaidInCapitalIncomeTaxDeficiencyFromShareBasedCompensations" name="AdjustmentsToAdditionalPaidInCapitalIncomeTaxDeficiencyFromShareBasedCompensations" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/> |
| <xsd:element id="onto_BalanceSheetDetailsTextBlock" name="BalanceSheetDetailsTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/> |
| <xsd:element id="onto_BalanceSheetDetailAbstract" name="BalanceSheetDetailAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_OtherIncomeExpenseAbstract" name="OtherIncomeExpenseAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_ShareRepurchaseTextBlock" name="ShareRepurchaseTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/> |
| <xsd:element id="onto_ShareRepurchaseProgramAbstract" name="ShareRepurchaseProgramAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_BusinessCombinationPotentialEarnoutAdditionalPayment" name="BusinessCombinationPotentialEarnoutAdditionalPayment" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/> |
| <xsd:element id="onto_BusinessCombinationPotentialEarnoutSubjectToPrincipalRemainingPeriod" name="BusinessCombinationPotentialEarnoutSubjectToPrincipalRemainingPeriod" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/> |
| <xsd:element id="onto_BusinessCombinationPotentialEarnoutAccrued" name="BusinessCombinationPotentialEarnoutAccrued" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/> |
| <xsd:element id="onto_BusinessAcquisitionAchievedEarnoutPayment" name="BusinessAcquisitionAchievedEarnoutPayment" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/> |
| <xsd:element id="onto_InspectrologyLLCMember" name="InspectrologyLLCMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsFairValue" name="AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/> |
| <xsd:element id="onto_IntangibleAssetsAccumulatedAmortizationExcludingGoodwill" name="IntangibleAssetsAccumulatedAmortizationExcludingGoodwill" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/> |
| <xsd:element id="onto_IdentifiableIntangibleAssetsAbstract" name="IdentifiableIntangibleAssetsAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_InventoryDetailsAbstract" name="InventoryDetailsAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_ComputerEquipmentAndSoftwareMember" name="ComputerEquipmentAndSoftwareMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_UnrecognizedTaxBenefitsIncludingInterestNoncurrent" name="UnrecognizedTaxBenefitsIncludingInterestNoncurrent" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/> |
| <xsd:element id="onto_ProceedsFromAccountsReceivable" name="ProceedsFromAccountsReceivable" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/> |
| <xsd:element id="onto_DueFromUnrelatedThirdParties" name="DueFromUnrelatedThirdParties" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/> |
| <xsd:element id="onto_CommitmentsAndContingenciesLineItems" name="CommitmentsAndContingenciesLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_CommitmentsAndContingenciesTable" name="CommitmentsAndContingenciesTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_IntellectualPropertyIndemnificationObligations" name="IntellectualPropertyIndemnificationObligations" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/> |
| <xsd:element id="onto_ProductWarrantyAccrualWarrantyPeriod" name="ProductWarrantyAccrualWarrantyPeriod" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/> |
| <xsd:element id="onto_MaximumBorrowingCapacityPercentageOfEligibleSecuritiesHeldAtLineOfCreditAccessed" name="MaximumBorrowingCapacityPercentageOfEligibleSecuritiesHeldAtLineOfCreditAccessed" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/> |
| <xsd:element id="onto_ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions" name="ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/> |
| <xsd:element id="onto_RestrictedStockUnitsActivityAbstract" name="RestrictedStockUnitsActivityAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_RestrictedStockUnitsServiceBasedRSUsMember" name="RestrictedStockUnitsServiceBasedRSUsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_PerformanceRestrictedStockUnitsMember" name="PerformanceRestrictedStockUnitsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_OtherExpenseIncome" name="OtherExpenseIncome" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/> |
| <xsd:element id="onto_AccumulatedOtherComprehensiveLossAbstract" name="AccumulatedOtherComprehensiveLossAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_TaxEffectMarketableSecurities" name="TaxEffectMarketableSecurities" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/> |
| <xsd:element id="onto_TaxEffectForeignCurrencyTranslation" name="TaxEffectForeignCurrencyTranslation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/> |
| <xsd:element id="onto_SegmentReportingByBusinessUnitAbstract" name="SegmentReportingByBusinessUnitAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_SystemsAndSoftwareRevenueMember" name="SystemsAndSoftwareRevenueMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_PartsRevenueMember" name="PartsRevenueMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_ServiceRevenueMember" name="ServiceRevenueMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_GeographicReportingAbstract" name="GeographicReportingAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_SoutheastAsiaMember" name="SoutheastAsiaMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_SKHynixIncMember" name="SKHynixIncMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_TaiwanSemiconductorManufacturingCompanyLimitedMember" name="TaiwanSemiconductorManufacturingCompanyLimitedMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_SamsungSemiconductorMember" name="SamsungSemiconductorMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_SharesRepurchaseAuthorizationLineItems" name="SharesRepurchaseAuthorizationLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| <xsd:element id="onto_SharesRepurchaseAuthorizationTable" name="SharesRepurchaseAuthorizationTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/> |
| </xsd:schema> |