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Onto Innovation Inc. – ‘10-Q’ for 7/2/22 – ‘EX-101.SCH’

On:  Tuesday, 8/9/22, at 5:17pm ET   ·   For:  7/2/22   ·   Accession #:  1564590-22-28807   ·   File #:  1-39110

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  As Of               Filer                 Filing    For·On·As Docs:Size             Issuer                      Filing Agent

 8/09/22  Onto Innovation Inc.              10-Q        7/02/22   84:10M                                    ActiveDisclosure/FA

Quarterly Report   —   Form 10-Q

Filing Table of Contents

Document/Exhibit                   Description                      Pages   Size 

 1: 10-Q        Quarterly Report                                    HTML   2.81M 
 2: EX-31.1     Certification -- §302 - SOA'02                      HTML     41K 
 3: EX-31.2     Certification -- §302 - SOA'02                      HTML     41K 
 4: EX-32.1     Certification -- §906 - SOA'02                      HTML     27K 
 5: EX-32.2     Certification -- §906 - SOA'02                      HTML     27K 
11: R1          Document and Entity Information Document            HTML     76K 
12: R2          Condensed Consolidated Statements of Operations     HTML    107K 
                (Unaudited)                                                      
13: R3          Condensed Consolidated Statements of Comprehensive  HTML     51K 
                Income (Unaudited)                                               
14: R4          Condensed Consolidated Balance Sheets (Unaudited)   HTML    124K 
15: R5          Condensed Consolidated Balance Sheets               HTML     26K 
                (Parenthetical) (Unaudited)                                      
16: R6          Condensed Consolidated Statements of Cash Flows     HTML     93K 
                (Unaudited)                                                      
17: R7          Condensed Consolidated Statements of Stockholders'  HTML     84K 
                Equity (Unaudited)                                               
18: R8          Basis of Presentation                               HTML     31K 
19: R9          Business Combination                                HTML     28K 
20: R10         Fair Value Measurements                             HTML    208K 
21: R11         Marketable Securities                               HTML    251K 
22: R12         Derivative Instruments and Hedging Activities       HTML     38K 
23: R13         Purchased Intangible Assets                         HTML    104K 
24: R14         Balance Sheet Details                               HTML    150K 
25: R15         Commitments and Contingencies                       HTML     61K 
26: R16         Revenue                                             HTML    103K 
27: R17         Share-Based Compensation                            HTML     49K 
28: R18         Other Expense, Net                                  HTML     59K 
29: R19         Income Taxes                                        HTML     63K 
30: R20         Earnings Per Share                                  HTML    105K 
31: R21         Accumulated Other Comprehensive Income (Loss)       HTML     52K 
32: R22         Segment Reporting and Geographic Information        HTML    183K 
33: R23         Share Repurchase Authorization                      HTML     26K 
34: R24         Basis of Presentation (Policies)                    HTML     32K 
35: R25         Fair Value Measurements - (Tables)                  HTML    203K 
36: R26         Marketable Securities - (Tables)                    HTML    252K 
37: R27         Derivative Instruments and Hedging Activities       HTML     36K 
                (Tables)                                                         
38: R28         Purchased Intangible Assets (Tables)                HTML    107K 
39: R29         Balance Sheet Details (Tables)                      HTML    158K 
40: R30         Commitments and Contingencies (Tables)              HTML     50K 
41: R31         Revenue (Tables)                                    HTML    101K 
42: R32         Share-Based Compensation - (Tables)                 HTML     46K 
43: R33         Other Expense, Net (Tables)                         HTML     59K 
44: R34         Income Taxes - (Tables)                             HTML     58K 
45: R35         Earnings Per Share (Tables)                         HTML    103K 
46: R36         Accumulated Other Comprehensive Income (Loss)       HTML     52K 
                (Tables)                                                         
47: R37         Segment Reporting and Geographic Information -      HTML    182K 
                (Tables)                                                         
48: R38         Business Combination - Textual (Details)            HTML     39K 
49: R39         Fair Value Measurements - Assets and Liabilities    HTML     80K 
                Carried at Fair Value Measured on a Recurring                    
                Basis (Details)                                                  
50: R40         Marketable Securities - Schedule of Marketable      HTML     50K 
                Securities by Category (Details)                                 
51: R41         Marketable Securities - Schedule of Amortized Cost  HTML     44K 
                and Estimated Fair Value of Marketable Securities                
                Classified by Maturity Date (Details)                            
52: R42         Marketable Securities - Summary of Estimated Fair   HTML     53K 
                Value and Gross Unrealized Holding Losses of                     
                Marketable Securities in Unrealized Loss Position                
                (Details)                                                        
53: R43         Derivative Instruments and Hedging Activities -     HTML     28K 
                Forward Contracts and Related Fair Values                        
                (Details)                                                        
54: R44         Purchased Intangible Assets - Schedule of           HTML     46K 
                Purchased Intangible Assets (Details)                            
55: R45         Purchased Intangible Assets - Schedule of           HTML     41K 
                Estimated Future Amortization Expenses (Details)                 
56: R46         Balance Sheet Details - Schedule of Inventories     HTML     34K 
                (Details)                                                        
57: R47         Balance Sheet Details - Schedule of Property,       HTML     44K 
                Plant and Equipment, Net (Details)                               
58: R48         Balance Sheet Details - Schedule of Other Assets    HTML     29K 
                (Details)                                                        
59: R49         Balance Sheet Details - Schedule of Accrued         HTML     33K 
                Liabilities (Details)                                            
60: R50         Balance Sheet Details - Schedule of Other Current   HTML     37K 
                Liabilities (Details)                                            
61: R51         Balance Sheet Details - Schedule of Other           HTML     37K 
                Non-Current Liabilities (Details)                                
62: R52         Commitments and Contingencies - Textual (Details)   HTML     40K 
63: R53         Commitments and Contingencies - Schedule of         HTML     32K 
                Changes in Warranty Reserves (Details)                           
64: R54         Revenue - Schedule of Disaggregation of Revenue by  HTML     34K 
                Timing of Revenue (Details)                                      
65: R55         Revenue - Additional Information (Details)          HTML     26K 
66: R56         Revenue - Schedule of Changes in Deferred Revenue   HTML     34K 
                (Details)                                                        
67: R57         Share-Based Compensation - Summary of Restricted    HTML     48K 
                Stock Unit Activity (Details)                                    
68: R58         Share-Based Compensation - Textual (Details)        HTML     41K 
69: R59         Other Expense, Net - Schedule of Other Expense,     HTML     31K 
                Net (Details)                                                    
70: R60         Income Taxes - Details of Income Tax (Details)      HTML     35K 
71: R61         Income Taxes - Textual (Details)                    HTML     25K 
72: R62         Earnings Per Share - Schedule of Basic and Diluted  HTML     59K 
                Earnings Per Share (Details)                                     
73: R63         Accumulated Other Comprehensive Income (Loss) -     HTML     42K 
                Components of Accumulated Other Comprehensive                    
                Loss, Net of Tax (Details)                                       
74: R64         Accumulated Other Comprehensive Income (Loss) -     HTML     27K 
                Additional Information (Details)                                 
75: R65         Segment Reporting and Geographic Information -      HTML     25K 
                Additional Information (Details)                                 
76: R66         Segment Reporting and Geographic Information -      HTML     47K 
                Schedule of Revenue from External Customers by                   
                Products and Services (Details)                                  
77: R67         Segment Reporting and Geographic Information -      HTML     45K 
                Schedule of Revenue from External Customers                      
                Attributed to Foreign Countries by Geographic Area               
                (Details)                                                        
78: R68         Segment Reporting and Geographic Information -      HTML     35K 
                Schedule of Revenue by Major Customer by Reporting               
                Segments (Details)                                               
79: R69         Share Repurchase Authorization - Textual (Details)  HTML     32K 
82: XML         IDEA XML File -- Filing Summary                      XML    156K 
80: XML         XBRL Instance -- onto-10q_20220702_htm               XML   3.16M 
81: EXCEL       IDEA Workbook of Financial Reports                  XLSX    121K 
 7: EX-101.CAL  XBRL Calculations -- onto-20220702_cal               XML    183K 
 8: EX-101.DEF  XBRL Definitions -- onto-20220702_def                XML    309K 
 9: EX-101.LAB  XBRL Labels -- onto-20220702_lab                     XML    945K 
10: EX-101.PRE  XBRL Presentations -- onto-20220702_pre              XML    693K 
 6: EX-101.SCH  XBRL Schema -- onto-20220702                         XSD    152K 
83: JSON        XBRL Instance as JSON Data -- MetaLinks              332±   532K 
84: ZIP         XBRL Zipped Folder -- 0001564590-22-028807-xbrl      Zip    263K 


‘EX-101.SCH’   —   XBRL Schema — onto-20220702


This Exhibit is an XBRL XML File.


                                                                                                                                                                                
<?xml version="1.0" encoding="windows-1252"?>
<!-- DFIN ActiveDisclosure(SM) XBRL Schema Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date : 2022-08-08T16:42:56.7141743+00:00 -->
<!-- Version : 5.0.1.747 -->
<!-- Package ID : 4fc44d86180b4cdfb2d650485e0d2cd0 -->
<!-- Copyright (c) 2022 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<xsd:schema xmlns:dei="http://xbrl.sec.gov/dei/2022" xmlns:us-types="http://fasb.org/us-types/2022" xmlns:stpr="http://xbrl.sec.gov/stpr/2022" xmlns:srt-types="http://fasb.org/srt-types/2022" xmlns:sic="http://xbrl.sec.gov/sic/2022" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:dtr-types="http://www.xbrl.org/dtr/type/2020-01-21" xmlns:srt="http://fasb.org/srt/2022" xmlns:enum2="http://xbrl.org/2020/extensible-enumerations-2.0" xmlns:us-gaap="http://fasb.org/us-gaap/2022" xmlns:naics="http://xbrl.sec.gov/naics/2022" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:country="http://xbrl.sec.gov/country/2022" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:currency="http://xbrl.sec.gov/currency/2022" xmlns:onto="http://www.ontoinnovation.com/20220702" xmlns:exch="http://xbrl.sec.gov/exch/2022" attributeFormDefault="unqualified" elementFormDefault="qualified" targetNamespace="http://www.ontoinnovation.com/20220702" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
<xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/instance"/>
<xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/linkbase"/>
<xsd:import schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" namespace="http://xbrl.org/2005/xbrldt"/>
<xsd:import schemaLocation="https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd" namespace="http://xbrl.org/2020/extensible-enumerations-2.0"/>
<xsd:import schemaLocation="https://xbrl.sec.gov/country/2022/country-2022.xsd" namespace="http://xbrl.sec.gov/country/2022"/>
<xsd:import schemaLocation="https://xbrl.sec.gov/currency/2022/currency-2022.xsd" namespace="http://xbrl.sec.gov/currency/2022"/>
<xsd:import schemaLocation="https://xbrl.sec.gov/dei/2022/dei-2022.xsd" namespace="http://xbrl.sec.gov/dei/2022"/>
<xsd:import schemaLocation="https://www.xbrl.org/dtr/type/2020-01-21/types.xsd" namespace="http://www.xbrl.org/dtr/type/2020-01-21"/>
<xsd:import schemaLocation="https://xbrl.sec.gov/exch/2022/exch-2022.xsd" namespace="http://xbrl.sec.gov/exch/2022"/>
<xsd:import schemaLocation="http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd" namespace="http://www.xbrl.org/2009/arcrole/fact-explanatoryFact"/>
<xsd:import schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" namespace="http://www.xbrl.org/2009/role/negated"/>
<xsd:import schemaLocation="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd" namespace="http://www.xbrl.org/2009/role/net"/>
<xsd:import schemaLocation="https://xbrl.sec.gov/naics/2022/naics-2022.xsd" namespace="http://xbrl.sec.gov/naics/2022"/>
<xsd:import schemaLocation="https://xbrl.sec.gov/sic/2022/sic-2022.xsd" namespace="http://xbrl.sec.gov/sic/2022"/>
<xsd:import schemaLocation="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd" namespace="http://fasb.org/srt/2022"/>
<xsd:import schemaLocation="https://xbrl.fasb.org/srt/2022/elts/srt-roles-2022.xsd" namespace="http://fasb.org/srt-roles/2022"/>
<xsd:import schemaLocation="https://xbrl.fasb.org/srt/2022/elts/srt-types-2022.xsd" namespace="http://fasb.org/srt-types/2022"/>
<xsd:import schemaLocation="https://xbrl.sec.gov/stpr/2022/stpr-2022.xsd" namespace="http://xbrl.sec.gov/stpr/2022"/>
<xsd:import schemaLocation="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd" namespace="http://fasb.org/us-gaap/2022"/>
<xsd:import schemaLocation="https://xbrl.fasb.org/us-gaap/2022/elts/us-roles-2022.xsd" namespace="http://fasb.org/us-roles/2022"/>
<xsd:import schemaLocation="https://xbrl.fasb.org/us-gaap/2022/elts/us-types-2022.xsd" namespace="http://fasb.org/us-types/2022"/>
<xsd:annotation>
<xsd:appinfo>
<link:roleType id="TemplateLink" roleURI="http://www.ontoinnovation.com/20220702/role/TemplateLink" xmlns:link="http://www.xbrl.org/2003/linkbase">
<link:definition> 00000 - Document - Template Link </link:definition>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="onto-20220702_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:title="Calculation Links, all" xlink:type="simple" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink"/>
<link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="onto-20220702_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:title="Definition Links, all" xlink:type="simple"/>
<link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="onto-20220702_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:title="Label Links, all" xlink:type="simple"/>
<link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="onto-20220702_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:title="Presentation Links, all" xlink:type="simple"/>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DocumentDocumentAndEntityInformationDocument" id="Role_DocumentDocumentAndEntityInformationDocument">
<link:definition> 100000 - Document - Document and Entity Information Document </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/StatementCondensedConsolidatedStatementsOfOperationsUnaudited" id="Role_StatementCondensedConsolidatedStatementsOfOperationsUnaudited">
<link:definition> 100010 - Statement - Condensed Consolidated Statements of Operations (Unaudited) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/StatementCONDENSEDCONSOLIDATEDSTATEMENTSOFCOMPREHENSIVEINCOMEUnaudited" id="Role_StatementCONDENSEDCONSOLIDATEDSTATEMENTSOFCOMPREHENSIVEINCOMEUnaudited">
<link:definition> 100020 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME (Unaudited) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/StatementCondensedConsolidatedBalanceSheetsUnaudited" id="Role_StatementCondensedConsolidatedBalanceSheetsUnaudited">
<link:definition> 100030 - Statement - Condensed Consolidated Balance Sheets (Unaudited) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/StatementCondensedConsolidatedBalanceSheetsParentheticalUnaudited" id="Role_StatementCondensedConsolidatedBalanceSheetsParentheticalUnaudited">
<link:definition> 100040 - Statement - Condensed Consolidated Balance Sheets (Parenthetical) (Unaudited) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/StatementCONDENSEDCONSOLIDATEDSTATEMENTSOFCASHFLOWSUnaudited" id="Role_StatementCONDENSEDCONSOLIDATEDSTATEMENTSOFCASHFLOWSUnaudited">
<link:definition> 100050 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS (Unaudited) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/StatementCONDENSEDCONSOLIDATEDSTATEMENTSOFSTOCKHOLDERSEQUITYUnaudited" id="Role_StatementCONDENSEDCONSOLIDATEDSTATEMENTSOFSTOCKHOLDERSEQUITYUnaudited">
<link:definition> 100060 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY (Unaudited) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBasisOfPresentation" id="Role_DisclosureBasisOfPresentation">
<link:definition> 100070 - Disclosure - Basis of Presentation </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBusinessCombination" id="Role_DisclosureBusinessCombination">
<link:definition> 100080 - Disclosure - Business Combination </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureFairValueMeasurements" id="Role_DisclosureFairValueMeasurements">
<link:definition> 100090 - Disclosure - Fair Value Measurements </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureMarketableSecurities" id="Role_DisclosureMarketableSecurities">
<link:definition> 100100 - Disclosure - Marketable Securities </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivities" id="Role_DisclosureDerivativeInstrumentsAndHedgingActivities">
<link:definition> 100110 - Disclosure - Derivative Instruments and Hedging Activities </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosurePurchasedIntangibleAssets" id="Role_DisclosurePurchasedIntangibleAssets">
<link:definition> 100120 - Disclosure - Purchased Intangible Assets </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetails" id="Role_DisclosureBalanceSheetDetails">
<link:definition> 100130 - Disclosure - Balance Sheet Details </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureCommitmentsAndContingencies" id="Role_DisclosureCommitmentsAndContingencies">
<link:definition> 100140 - Disclosure - Commitments and Contingencies </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureRevenue" id="Role_DisclosureRevenue">
<link:definition> 100150 - Disclosure - Revenue </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureShareBasedCompensation" id="Role_DisclosureShareBasedCompensation">
<link:definition> 100160 - Disclosure - Share-Based Compensation </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureOtherExpenseNet" id="Role_DisclosureOtherExpenseNet">
<link:definition> 100170 - Disclosure - Other Expense, Net </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureIncomeTaxes" id="Role_DisclosureIncomeTaxes">
<link:definition> 100180 - Disclosure - Income Taxes </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureEarningsPerShare" id="Role_DisclosureEarningsPerShare">
<link:definition> 100190 - Disclosure - Earnings Per Share </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureAccumulatedOtherComprehensiveIncomeLoss" id="Role_DisclosureAccumulatedOtherComprehensiveIncomeLoss">
<link:definition> 100200 - Disclosure - Accumulated Other Comprehensive Income (Loss) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureSegmentReportingAndGeographicInformation" id="Role_DisclosureSegmentReportingAndGeographicInformation">
<link:definition> 100210 - Disclosure - Segment Reporting and Geographic Information </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureShareRepurchaseAuthorization" id="Role_DisclosureShareRepurchaseAuthorization">
<link:definition> 100220 - Disclosure - Share Repurchase Authorization </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBasisOfPresentationPolicies" id="Role_DisclosureBasisOfPresentationPolicies">
<link:definition> 100230 - Disclosure - Basis of Presentation (Policies) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureFairValueMeasurementsTables" id="Role_DisclosureFairValueMeasurementsTables">
<link:definition> 100240 - Disclosure - Fair Value Measurements - (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureMarketableSecuritiesTables" id="Role_DisclosureMarketableSecuritiesTables">
<link:definition> 100250 - Disclosure - Marketable Securities - (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivitiesTables" id="Role_DisclosureDerivativeInstrumentsAndHedgingActivitiesTables">
<link:definition> 100260 - Disclosure - Derivative Instruments and Hedging Activities (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosurePurchasedIntangibleAssetsTables" id="Role_DisclosurePurchasedIntangibleAssetsTables">
<link:definition> 100270 - Disclosure - Purchased Intangible Assets (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsTables" id="Role_DisclosureBalanceSheetDetailsTables">
<link:definition> 100280 - Disclosure - Balance Sheet Details (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureCommitmentsAndContingenciesTables" id="Role_DisclosureCommitmentsAndContingenciesTables">
<link:definition> 100290 - Disclosure - Commitments and Contingencies (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureRevenueTables" id="Role_DisclosureRevenueTables">
<link:definition> 100300 - Disclosure - Revenue (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureShareBasedCompensationTables" id="Role_DisclosureShareBasedCompensationTables">
<link:definition> 100310 - Disclosure - Share-Based Compensation - (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureOtherExpenseNetTables" id="Role_DisclosureOtherExpenseNetTables">
<link:definition> 100320 - Disclosure - Other Expense, Net (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureIncomeTaxesTables" id="Role_DisclosureIncomeTaxesTables">
<link:definition> 100330 - Disclosure - Income Taxes - (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureEarningsPerShareTables" id="Role_DisclosureEarningsPerShareTables">
<link:definition> 100340 - Disclosure - Earnings Per Share (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureAccumulatedOtherComprehensiveIncomeLossTables" id="Role_DisclosureAccumulatedOtherComprehensiveIncomeLossTables">
<link:definition> 100350 - Disclosure - Accumulated Other Comprehensive Income (Loss) (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationTables" id="Role_DisclosureSegmentReportingAndGeographicInformationTables">
<link:definition> 100360 - Disclosure - Segment Reporting and Geographic Information - (Tables) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBusinessCombinationTextualDetails" id="Role_DisclosureBusinessCombinationTextualDetails">
<link:definition> 100370 - Disclosure - Business Combination - Textual (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureFairValueMeasurementsAssetsAndLiabilitiesCarriedAtFairValueMeasuredOnRecurringBasisDetails" id="Role_DisclosureFairValueMeasurementsAssetsAndLiabilitiesCarriedAtFairValueMeasuredOnRecurringBasisDetails">
<link:definition> 100380 - Disclosure - Fair Value Measurements - Assets and Liabilities Carried at Fair Value Measured on a Recurring Basis (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureMarketableSecuritiesScheduleOfMarketableSecuritiesByCategoryDetails" id="Role_DisclosureMarketableSecuritiesScheduleOfMarketableSecuritiesByCategoryDetails">
<link:definition> 100390 - Disclosure - Marketable Securities - Schedule of Marketable Securities by Category (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureMarketableSecuritiesScheduleOfAmortizedCostAndEstimatedFairValueOfMarketableSecuritiesClassifiedByMaturityDateDetails" id="Role_DisclosureMarketableSecuritiesScheduleOfAmortizedCostAndEstimatedFairValueOfMarketableSecuritiesClassifiedByMaturityDateDetails">
<link:definition> 100400 - Disclosure - Marketable Securities - Schedule of Amortized Cost and Estimated Fair Value of Marketable Securities Classified by Maturity Date (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureMarketableSecuritiesSummaryOfEstimatedFairValueAndGrossUnrealizedHoldingLossesOfMarketableSecuritiesInUnrealizedLossPositionDetails" id="Role_DisclosureMarketableSecuritiesSummaryOfEstimatedFairValueAndGrossUnrealizedHoldingLossesOfMarketableSecuritiesInUnrealizedLossPositionDetails">
<link:definition> 100410 - Disclosure - Marketable Securities - Summary of Estimated Fair Value and Gross Unrealized Holding Losses of Marketable Securities in Unrealized Loss Position (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureDerivativeInstrumentsAndHedgingActivitiesForwardContractsAndRelatedFairValuesDetails" id="Role_DisclosureDerivativeInstrumentsAndHedgingActivitiesForwardContractsAndRelatedFairValuesDetails">
<link:definition> 100420 - Disclosure - Derivative Instruments and Hedging Activities - Forward Contracts and Related Fair Values (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosurePurchasedIntangibleAssetsScheduleOfPurchasedIntangibleAssetsDetails" id="Role_DisclosurePurchasedIntangibleAssetsScheduleOfPurchasedIntangibleAssetsDetails">
<link:definition> 100430 - Disclosure - Purchased Intangible Assets - Schedule of Purchased Intangible Assets (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosurePurchasedIntangibleAssetsScheduleOfEstimatedFutureAmortizationExpensesDetails" id="Role_DisclosurePurchasedIntangibleAssetsScheduleOfEstimatedFutureAmortizationExpensesDetails">
<link:definition> 100440 - Disclosure - Purchased Intangible Assets - Schedule of Estimated Future Amortization Expenses (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfInventoriesDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfInventoriesDetails">
<link:definition> 100450 - Disclosure - Balance Sheet Details - Schedule of Inventories (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfPropertyPlantAndEquipmentNetDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfPropertyPlantAndEquipmentNetDetails">
<link:definition> 100460 - Disclosure - Balance Sheet Details - Schedule of Property, Plant and Equipment, Net (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherAssetsDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfOtherAssetsDetails">
<link:definition> 100470 - Disclosure - Balance Sheet Details - Schedule of Other Assets (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfAccruedLiabilitiesDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfAccruedLiabilitiesDetails">
<link:definition> 100480 - Disclosure - Balance Sheet Details - Schedule of Accrued Liabilities (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherCurrentLiabilitiesDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfOtherCurrentLiabilitiesDetails">
<link:definition> 100490 - Disclosure - Balance Sheet Details - Schedule of Other Current Liabilities (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureBalanceSheetDetailsScheduleOfOtherNonCurrentLiabilitiesDetails" id="Role_DisclosureBalanceSheetDetailsScheduleOfOtherNonCurrentLiabilitiesDetails">
<link:definition> 100500 - Disclosure - Balance Sheet Details - Schedule of Other Non-Current Liabilities (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureCommitmentsAndContingenciesTextualDetails" id="Role_DisclosureCommitmentsAndContingenciesTextualDetails">
<link:definition> 100510 - Disclosure - Commitments and Contingencies - Textual (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureCommitmentsAndContingenciesScheduleOfChangesInWarrantyReservesDetails" id="Role_DisclosureCommitmentsAndContingenciesScheduleOfChangesInWarrantyReservesDetails">
<link:definition> 100520 - Disclosure - Commitments and Contingencies - Schedule of Changes in Warranty Reserves (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureRevenueScheduleOfDisaggregationOfRevenueByTimingOfRevenueDetails" id="Role_DisclosureRevenueScheduleOfDisaggregationOfRevenueByTimingOfRevenueDetails">
<link:definition> 100530 - Disclosure - Revenue - Schedule of Disaggregation of Revenue by Timing of Revenue (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureRevenueAdditionalInformationDetails" id="Role_DisclosureRevenueAdditionalInformationDetails">
<link:definition> 100540 - Disclosure - Revenue - Additional Information (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureRevenueScheduleOfChangesInDeferredRevenueDetails" id="Role_DisclosureRevenueScheduleOfChangesInDeferredRevenueDetails">
<link:definition> 100550 - Disclosure - Revenue - Schedule of Changes in Deferred Revenue (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureShareBasedCompensationSummaryOfRestrictedStockUnitActivityDetails" id="Role_DisclosureShareBasedCompensationSummaryOfRestrictedStockUnitActivityDetails">
<link:definition> 100560 - Disclosure - Share-Based Compensation - Summary of Restricted Stock Unit Activity (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureShareBasedCompensationTextualDetails" id="Role_DisclosureShareBasedCompensationTextualDetails">
<link:definition> 100570 - Disclosure - Share-Based Compensation - Textual (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureOtherExpenseNetScheduleOfOtherExpenseNetDetails" id="Role_DisclosureOtherExpenseNetScheduleOfOtherExpenseNetDetails">
<link:definition> 100580 - Disclosure - Other Expense, Net - Schedule of Other Expense, Net (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureIncomeTaxesDetailsOfIncomeTaxDetails" id="Role_DisclosureIncomeTaxesDetailsOfIncomeTaxDetails">
<link:definition> 100590 - Disclosure - Income Taxes - Details of Income Tax (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureIncomeTaxesTextualDetails" id="Role_DisclosureIncomeTaxesTextualDetails">
<link:definition> 100600 - Disclosure - Income Taxes - Textual (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureEarningsPerShareScheduleOfBasicAndDilutedEarningsPerShareDetails" id="Role_DisclosureEarningsPerShareScheduleOfBasicAndDilutedEarningsPerShareDetails">
<link:definition> 100610 - Disclosure - Earnings Per Share - Schedule of Basic and Diluted Earnings Per Share (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureAccumulatedOtherComprehensiveIncomeLossComponentsOfAccumulatedOtherComprehensiveLossNetOfTaxDetails" id="Role_DisclosureAccumulatedOtherComprehensiveIncomeLossComponentsOfAccumulatedOtherComprehensiveLossNetOfTaxDetails">
<link:definition> 100620 - Disclosure - Accumulated Other Comprehensive Income (Loss) - Components of Accumulated Other Comprehensive Loss, Net of Tax (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureAccumulatedOtherComprehensiveIncomeLossAdditionalInformationDetails" id="Role_DisclosureAccumulatedOtherComprehensiveIncomeLossAdditionalInformationDetails">
<link:definition> 100630 - Disclosure - Accumulated Other Comprehensive Income (Loss) - Additional Information (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationAdditionalInformationDetails" id="Role_DisclosureSegmentReportingAndGeographicInformationAdditionalInformationDetails">
<link:definition> 100640 - Disclosure - Segment Reporting and Geographic Information - Additional Information (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationScheduleOfRevenueFromExternalCustomersByProductsAndServicesDetails" id="Role_DisclosureSegmentReportingAndGeographicInformationScheduleOfRevenueFromExternalCustomersByProductsAndServicesDetails">
<link:definition> 100650 - Disclosure - Segment Reporting and Geographic Information - Schedule of Revenue from External Customers by Products and Services (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaDetails" id="Role_DisclosureSegmentReportingAndGeographicInformationScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaDetails">
<link:definition> 100660 - Disclosure - Segment Reporting and Geographic Information - Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureSegmentReportingAndGeographicInformationScheduleOfRevenueByMajorCustomerByReportingSegmentsDetails" id="Role_DisclosureSegmentReportingAndGeographicInformationScheduleOfRevenueByMajorCustomerByReportingSegmentsDetails">
<link:definition> 100670 - Disclosure - Segment Reporting and Geographic Information - Schedule of Revenue by Major Customer by Reporting Segments (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
<link:roleType roleURI="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureShareRepurchaseAuthorizationTextualDetails" id="Role_DisclosureShareRepurchaseAuthorizationTextualDetails">
<link:definition> 100680 - Disclosure - Share Repurchase Authorization - Textual (Details) </link:definition>
<link:usedOn> link:calculationLink </link:usedOn>
<link:usedOn> link:presentationLink </link:usedOn>
<link:usedOn> link:definitionLink </link:usedOn>
</link:roleType>
</xsd:appinfo>
</xsd:annotation>
<xsd:element id="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsAmortizedCost" name="AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsAmortizedCost" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
<xsd:element id="onto_EarningsPerSharesBasicAndDilutedAbstract" name="EarningsPerSharesBasicAndDilutedAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_AcquiredInventoryStepUpAmortization" name="AcquiredInventoryStepUpAmortization" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
<xsd:element id="onto_ProvisionForInventoryValuation" name="ProvisionForInventoryValuation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
<xsd:element id="onto_AdjustmentsToAdditionalPaidInCapitalIncomeTaxDeficiencyFromShareBasedCompensations" name="AdjustmentsToAdditionalPaidInCapitalIncomeTaxDeficiencyFromShareBasedCompensations" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
<xsd:element id="onto_BalanceSheetDetailsTextBlock" name="BalanceSheetDetailsTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
<xsd:element id="onto_BalanceSheetDetailAbstract" name="BalanceSheetDetailAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_OtherIncomeExpenseAbstract" name="OtherIncomeExpenseAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_ShareRepurchaseTextBlock" name="ShareRepurchaseTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
<xsd:element id="onto_ShareRepurchaseProgramAbstract" name="ShareRepurchaseProgramAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_BusinessCombinationPotentialEarnoutAdditionalPayment" name="BusinessCombinationPotentialEarnoutAdditionalPayment" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
<xsd:element id="onto_BusinessCombinationPotentialEarnoutSubjectToPrincipalRemainingPeriod" name="BusinessCombinationPotentialEarnoutSubjectToPrincipalRemainingPeriod" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
<xsd:element id="onto_BusinessCombinationPotentialEarnoutAccrued" name="BusinessCombinationPotentialEarnoutAccrued" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
<xsd:element id="onto_BusinessAcquisitionAchievedEarnoutPayment" name="BusinessAcquisitionAchievedEarnoutPayment" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
<xsd:element id="onto_InspectrologyLLCMember" name="InspectrologyLLCMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsFairValue" name="AvailableForSaleSecuritiesDebtMaturitiesAfterFiveYearsFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
<xsd:element id="onto_IntangibleAssetsAccumulatedAmortizationExcludingGoodwill" name="IntangibleAssetsAccumulatedAmortizationExcludingGoodwill" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
<xsd:element id="onto_IdentifiableIntangibleAssetsAbstract" name="IdentifiableIntangibleAssetsAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_InventoryDetailsAbstract" name="InventoryDetailsAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_ComputerEquipmentAndSoftwareMember" name="ComputerEquipmentAndSoftwareMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_UnrecognizedTaxBenefitsIncludingInterestNoncurrent" name="UnrecognizedTaxBenefitsIncludingInterestNoncurrent" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
<xsd:element id="onto_ProceedsFromAccountsReceivable" name="ProceedsFromAccountsReceivable" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
<xsd:element id="onto_DueFromUnrelatedThirdParties" name="DueFromUnrelatedThirdParties" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
<xsd:element id="onto_CommitmentsAndContingenciesLineItems" name="CommitmentsAndContingenciesLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_CommitmentsAndContingenciesTable" name="CommitmentsAndContingenciesTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_IntellectualPropertyIndemnificationObligations" name="IntellectualPropertyIndemnificationObligations" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
<xsd:element id="onto_ProductWarrantyAccrualWarrantyPeriod" name="ProductWarrantyAccrualWarrantyPeriod" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
<xsd:element id="onto_MaximumBorrowingCapacityPercentageOfEligibleSecuritiesHeldAtLineOfCreditAccessed" name="MaximumBorrowingCapacityPercentageOfEligibleSecuritiesHeldAtLineOfCreditAccessed" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
<xsd:element id="onto_ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions" name="ContractWithCustomerLiabilityRevenueRecognizedIncludingAdditions" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
<xsd:element id="onto_RestrictedStockUnitsActivityAbstract" name="RestrictedStockUnitsActivityAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_RestrictedStockUnitsServiceBasedRSUsMember" name="RestrictedStockUnitsServiceBasedRSUsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_PerformanceRestrictedStockUnitsMember" name="PerformanceRestrictedStockUnitsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_OtherExpenseIncome" name="OtherExpenseIncome" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
<xsd:element id="onto_AccumulatedOtherComprehensiveLossAbstract" name="AccumulatedOtherComprehensiveLossAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_TaxEffectMarketableSecurities" name="TaxEffectMarketableSecurities" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
<xsd:element id="onto_TaxEffectForeignCurrencyTranslation" name="TaxEffectForeignCurrencyTranslation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
<xsd:element id="onto_SegmentReportingByBusinessUnitAbstract" name="SegmentReportingByBusinessUnitAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_SystemsAndSoftwareRevenueMember" name="SystemsAndSoftwareRevenueMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_PartsRevenueMember" name="PartsRevenueMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_ServiceRevenueMember" name="ServiceRevenueMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_GeographicReportingAbstract" name="GeographicReportingAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_SoutheastAsiaMember" name="SoutheastAsiaMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_SKHynixIncMember" name="SKHynixIncMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_TaiwanSemiconductorManufacturingCompanyLimitedMember" name="TaiwanSemiconductorManufacturingCompanyLimitedMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_SamsungSemiconductorMember" name="SamsungSemiconductorMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_SharesRepurchaseAuthorizationLineItems" name="SharesRepurchaseAuthorizationLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
<xsd:element id="onto_SharesRepurchaseAuthorizationTable" name="SharesRepurchaseAuthorizationTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
</xsd:schema>


3 Previous Filings that this Filing References

  As Of               Filer                 Filing    For·On·As Docs:Size             Issuer                      Filing Agent

 5/17/22  Onto Innovation Inc.              8-K:5,7,9   5/17/22   12:230K                                   ActiveDisclosure/FA
 1/27/20  Onto Innovation Inc.              8-K:5,9     1/22/20   11:444K                                   ActiveDisclosure/FA
10/28/19  Onto Innovation Inc.              8-K:2,3,5,710/25/19   17:666K                                   Donnelley … Solutions/FA
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Filing Submission 0001564590-22-028807   –   Alternative Formats (Word / Rich Text, HTML, Plain Text, et al.)

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