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<!-- DFIN ActiveDisclosure(SM) XBRL Linkbase Document - http://www.dfinsolutions.com/ --> |
<!-- Creation Date : 2022-08-08T16:42:56.7141743+00:00 --> |
<!-- Version : 5.0.1.747 --> |
<!-- Package ID : 4fc44d86180b4cdfb2d650485e0d2cd0 --> |
<!-- Copyright (c) 2022 Donnelley Financial Solutions, Inc. All Rights Reserved. --> |
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| | <link:loc xlink:href="onto-20220702.xsd#onto_TaiwanSemiconductorManufacturingCompanyLimitedMember" xlink:type="locator" xlink:label="onto_TaiwanSemiconductorManufacturingCompanyLimitedMember"/> |
| | <link:loc xlink:href="onto-20220702.xsd#onto_SKHynixIncMember" xlink:type="locator" xlink:label="onto_SKHynixIncMember"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_NameOfMajorCustomerDomain" xlink:type="locator" xlink:label="srt_NameOfMajorCustomerDomain"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MajorCustomersAxis" xlink:type="locator" xlink:label="srt_MajorCustomersAxis"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SalesRevenueNetMember" xlink:type="locator" xlink:label="us-gaap_SalesRevenueNetMember"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:type="locator" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:type="locator" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:type="locator" xlink:label="us-gaap_CustomerConcentrationRiskMember"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:type="locator" xlink:label="us-gaap_ConcentrationRiskTypeDomain"/> |
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| | <link:loc xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_ConcentrationRiskTable" xlink:type="locator" xlink:label="us-gaap_ConcentrationRiskTable"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_SegmentReportingAbstract" xlink:type="locator" xlink:label="us-gaap_SegmentReportingAbstract"/> |
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| | <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_NameOfMajorCustomerDomain" order="10260.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="onto_SKHynixIncMember" order="10280.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="onto_TaiwanSemiconductorManufacturingCompanyLimitedMember" order="10300.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="onto_SamsungSemiconductorMember" order="10320.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskLineItems" order="10340.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/> |
| | <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskPercentage1" order="10350.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/positiveLabel"/> |
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| <link:presentationLink xlink:type="extended" xlink:role="http://www.ontoinnovation.com/20220702/taxonomy/role/DisclosureShareRepurchaseAuthorizationTextualDetails"> |
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| | <link:loc xlink:href="https://xbrl.fasb.org/us-gaap/2022/elts/us-gaap-2022.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" xlink:type="locator" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares"/> |
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| | <link:loc xlink:href="onto-20220702.xsd#onto_SharesRepurchaseAuthorizationLineItems" xlink:type="locator" xlink:label="onto_SharesRepurchaseAuthorizationLineItems"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MinimumMember" xlink:type="locator" xlink:label="srt_MinimumMember"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_MaximumMember" xlink:type="locator" xlink:label="srt_MaximumMember"/> |
| | <link:loc xlink:href="https://xbrl.fasb.org/srt/2022/elts/srt-2022.xsd#srt_RangeMember" xlink:type="locator" xlink:label="srt_RangeMember"/> |
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| | <link:loc xlink:href="onto-20220702.xsd#onto_SharesRepurchaseAuthorizationTable" xlink:type="locator" xlink:label="onto_SharesRepurchaseAuthorizationTable"/> |
| | <link:loc xlink:href="onto-20220702.xsd#onto_ShareRepurchaseProgramAbstract" xlink:type="locator" xlink:label="onto_ShareRepurchaseProgramAbstract"/> |
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