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<?xml version="1.0" encoding="windows-1252"?> |
<!-- XBRL document created with Merrill Bridge 7.3.329.0 --> |
<!-- Based on XBRL 2.1 --> |
<!-- Created on: 11/3/2017 10:03:14 AM --> |
<!-- Modified on: 11/3/2017 10:03:14 AM --> |
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance"> |
| <roleRef xlink:type="simple" xlink:href="acls-20170930.xsd#StatementConsolidatedStatementsOfOperations" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xmlns="http://www.xbrl.org/2003/linkbase"/> |
| <roleRef xlink:type="simple" xlink:href="acls-20170930.xsd#StatementConsolidatedStatementsOfComprehensiveIncome" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" xmlns="http://www.xbrl.org/2003/linkbase"/> |
| <roleRef xlink:type="simple" xlink:href="acls-20170930.xsd#StatementConsolidatedBalanceSheets" roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" xmlns="http://www.xbrl.org/2003/linkbase"/> |
| <roleRef xlink:type="simple" xlink:href="acls-20170930.xsd#StatementConsolidatedStatementsOfCashFlows" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" xmlns="http://www.xbrl.org/2003/linkbase"/> |
| <roleRef xlink:type="simple" xlink:href="acls-20170930.xsd#DisclosureComputationOfNetEarningsPerShareDetails" roleURI="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails" xmlns="http://www.xbrl.org/2003/linkbase"/> |
| <roleRef xlink:type="simple" xlink:href="acls-20170930.xsd#DisclosureCashCashEquivalentsAndRestrictedCashDetails" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xmlns="http://www.xbrl.org/2003/linkbase"/> |
| <roleRef xlink:type="simple" xlink:href="acls-20170930.xsd#DisclosureInventoriesNetDetails" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" xmlns="http://www.xbrl.org/2003/linkbase"/> |
| <roleRef xlink:type="simple" xlink:href="acls-20170930.xsd#DisclosureProductWarrantyDetails" roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" xmlns="http://www.xbrl.org/2003/linkbase"/> |
| <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xlink:type="extended" xlink:title="00100 - Statement - Consolidated Statements of Operations" xmlns="http://www.xbrl.org/2003/linkbase"> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_635454443249647540"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_635454443249647540" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_636453001943965701" xlink:to="us-gaap_OperatingIncomeLoss_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss_636453001943965701" xlink:to="us-gaap_GrossProfit_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="us-gaap_SalesRevenueNet_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_GrossProfit_636453001943965701" xlink:to="us-gaap_SalesRevenueNet_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_SalesRevenueGoodsNet" xlink:label="us-gaap_SalesRevenueGoodsNet_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_SalesRevenueNet_636453001943965701" xlink:to="us-gaap_SalesRevenueGoodsNet_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_SalesRevenueServicesNet" xlink:label="us-gaap_SalesRevenueServicesNet_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_SalesRevenueNet_636453001943965701" xlink:to="us-gaap_SalesRevenueServicesNet_636453001943965701" order="2" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_GrossProfit_636453001943965701" xlink:to="us-gaap_CostOfGoodsAndServicesSold_636453001943965701" order="2" use="optional" weight="-1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_CostOfGoodsSold" xlink:label="us-gaap_CostOfGoodsSold_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CostOfGoodsAndServicesSold_636453001943965701" xlink:to="us-gaap_CostOfGoodsSold_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_CostOfServices" xlink:label="us-gaap_CostOfServices_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CostOfGoodsAndServicesSold_636453001943965701" xlink:to="us-gaap_CostOfServices_636453001943965701" order="2" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss_636453001943965701" xlink:to="us-gaap_OperatingExpenses_636453001943965701" order="2" use="optional" weight="-1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_636453001943965701" xlink:to="us-gaap_ResearchAndDevelopmentExpense_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="us-gaap_SellingAndMarketingExpense_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_636453001943965701" xlink:to="us-gaap_SellingAndMarketingExpense_636453001943965701" order="2" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="us-gaap_GeneralAndAdministrativeExpense_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_636453001943965701" xlink:to="us-gaap_GeneralAndAdministrativeExpense_636453001943965701" order="3" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_636453001943965701" xlink:to="us-gaap_RestructuringCharges_636453001943965701" order="4" use="optional" weight="1" priority="2"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_636453001943965701" xlink:to="us-gaap_NonoperatingIncomeExpense_636453001943965701" order="2" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NonoperatingIncomeExpense_636453001943965701" xlink:to="us-gaap_InvestmentIncomeInterest_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NonoperatingIncomeExpense_636453001943965701" xlink:to="us-gaap_InterestExpense_636453001943965701" order="2" use="optional" weight="-1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NonoperatingIncomeExpense_636453001943965701" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_636453001943965701" order="3" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_635454443249647540" xlink:to="us-gaap_IncomeTaxExpenseBenefit_636453001943965701" order="2" use="optional" weight="-1"/> |
| | </calculationLink> |
| <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" xlink:type="extended" xlink:title="00200 - Statement - Consolidated Statements of Comprehensive Income" xmlns="http://www.xbrl.org/2003/linkbase"> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_636453001943965701" order="1" use="optional" weight="1" priority="2"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTax_636453001943965701" order="2" use="optional" weight="1" priority="2"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTax_636453001943965701" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_636453001943965701" order="1" use="optional" weight="1" priority="3"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTax_636453001943965701" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_636453001943965701" order="2" use="optional" weight="-1" priority="2"/> |
| | </calculationLink> |
| <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" xlink:type="extended" xlink:title="00300 - Statement - Consolidated Balance Sheets" xmlns="http://www.xbrl.org/2003/linkbase"> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_AssetsCurrent_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_636453001943965701" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_636453001943965701" xlink:to="us-gaap_AccountsReceivableNetCurrent_636453001943965701" order="2" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_636453001943965701" xlink:to="us-gaap_InventoryNet_636453001943965701" order="3" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_636453001943965701" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_636453001943965701" order="4" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_636453001943965701" order="2" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_636453001943965701" order="3" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OtherAssetsNoncurrent_636453001943965701" order="4" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_Liabilities_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_636453001943965701" xlink:to="us-gaap_LiabilitiesCurrent_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_636453001943965701" xlink:to="us-gaap_AccountsPayableCurrent_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_636453001943965701" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_636453001943965701" order="2" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_636453001943965701" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_636453001943965701" order="3" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_636453001943965701" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_636453001943965701" order="4" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_DeferredRevenueCurrent" xlink:label="us-gaap_DeferredRevenueCurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_636453001943965701" xlink:to="us-gaap_DeferredRevenueCurrent_636453001943965701" order="5" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_636453001943965701" xlink:to="us-gaap_OtherLiabilitiesCurrent_636453001943965701" order="6" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_PresentValueOfFutureMinimumLeasePaymentsSaleLeasebackTransactions" xlink:label="us-gaap_PresentValueOfFutureMinimumLeasePaymentsSaleLeasebackTransactions_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_636453001943965701" xlink:to="us-gaap_PresentValueOfFutureMinimumLeasePaymentsSaleLeasebackTransactions_636453001943965701" order="2" use="optional" weight="1" priority="2"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_DeferredRevenueNoncurrent" xlink:label="us-gaap_DeferredRevenueNoncurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_636453001943965701" xlink:to="us-gaap_DeferredRevenueNoncurrent_636453001943965701" order="3" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_636453001943965701" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_636453001943965701" order="4" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_StockholdersEquity_636453001943965701" order="2" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_PreferredStockValue" xlink:label="us-gaap_PreferredStockValue_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_636453001943965701" xlink:to="us-gaap_PreferredStockValue_636453001943965701" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_CommonStockValueOutstanding" xlink:label="us-gaap_CommonStockValueOutstanding_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_636453001943965701" xlink:to="us-gaap_CommonStockValueOutstanding_636453001943965701" order="2" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="us-gaap_AdditionalPaidInCapital_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_636453001943965701" xlink:to="us-gaap_AdditionalPaidInCapital_636453001943965701" order="3" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_636453001943965701" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_636453001943965701" order="4" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_636453001943965701"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_636453001943965701" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_636453001943965701" order="5" use="optional" weight="1" priority="2"/> |
| | </calculationLink> |
| <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" xlink:type="extended" xlink:title="00400 - Statement - Consolidated Statements of Cash Flows" xmlns="http://www.xbrl.org/2003/linkbase"> |
| | <loc xlink:type="locator" xlink:href="acls-20170930.xsd#acls_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="acls_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" order="1" use="optional" weight="1" priority="4"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_ProfitLoss_636453001944121703" order="1" use="optional" weight="1" priority="2"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="us-gaap_DepreciationDepletionAndAmortization_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_DepreciationDepletionAndAmortization_636453001944121703" order="2" use="optional" weight="1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment_636453001944121703" order="3" use="optional" weight="-1" priority="3"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_ProvisionForDoubtfulAccounts_636453001944121703" order="4" use="optional" weight="1" priority="2"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_636453001944121703" order="5" use="optional" weight="1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_ShareBasedCompensation_636453001944121703" order="6" use="optional" weight="1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="us-gaap_InventoryWriteDown_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_InventoryWriteDown_636453001944121703" order="7" use="optional" weight="1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable_636453001944121703" order="8" use="optional" weight="-1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_IncreaseDecreaseInInventories_636453001944121703" order="9" use="optional" weight="-1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_636453001944121703" order="10" use="optional" weight="-1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_636453001944121703" order="11" use="optional" weight="1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_IncreaseDecreaseInDeferredRevenue" xlink:label="us-gaap_IncreaseDecreaseInDeferredRevenue_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_IncreaseDecreaseInDeferredRevenue_636453001944121703" order="12" use="optional" weight="1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_636453001944121703" order="13" use="optional" weight="1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_636453001944121703" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_636453001944121703" order="14" use="optional" weight="-1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_636453001944121703" order="2" use="optional" weight="1" priority="4"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities_636453001944121703" xlink:to="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_636453001944121703" order="1" use="optional" weight="1" priority="2"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities_636453001944121703" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_636453001944121703" order="2" use="optional" weight="-1" priority="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_636453001944121703" order="3" use="optional" weight="1" priority="4"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ProceedsFromRepaymentsOfRestrictedCashFinancingActivities" xlink:label="us-gaap_ProceedsFromRepaymentsOfRestrictedCashFinancingActivities_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_636453001944121703" xlink:to="us-gaap_ProceedsFromRepaymentsOfRestrictedCashFinancingActivities_636453001944121703" order="1" use="optional" weight="1" priority="3"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_PaymentsOfFinancingCosts" xlink:label="us-gaap_PaymentsOfFinancingCosts_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_636453001944121703" xlink:to="us-gaap_PaymentsOfFinancingCosts_636453001944121703" order="2" use="optional" weight="-1" priority="3"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ProceedsFromStockPlans" xlink:label="us-gaap_ProceedsFromStockPlans_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_636453001944121703" xlink:to="us-gaap_ProceedsFromStockPlans_636453001944121703" order="3" use="optional" weight="1" priority="2"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_636453001944121703" xlink:to="us-gaap_ProceedsFromStockOptionsExercised_636453001944121703" order="4" use="optional" weight="1" priority="2"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_EffectOfExchangeRateOnCashAndCashEquivalentsContinuingOperations_636453001944121703" order="4" use="optional" weight="1" priority="4"/> |
| | </calculationLink> |
| <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails" xlink:type="extended" xlink:title="40301 - Disclosure - Computation of Net Earnings per Share (Details)" xmlns="http://www.xbrl.org/2003/linkbase"> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_636453001944121703" order="1" use="optional" weight="1" priority="2"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_636453001944121703" order="2" use="optional" weight="1" priority="2"/> |
| | </calculationLink> |
| <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xlink:type="extended" xlink:title="40501 - Disclosure - Cash, cash equivalents and restricted cash (Details)" xmlns="http://www.xbrl.org/2003/linkbase"> |
| | <loc xlink:type="locator" xlink:href="acls-20170930.xsd#acls_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="acls_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_636453001944121703" order="1" use="optional" weight="1" priority="3"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalents" xlink:label="us-gaap_RestrictedCashAndCashEquivalents_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_RestrictedCashAndCashEquivalents_636453001944121703" order="2" use="optional" weight="1" priority="3"/> |
| | </calculationLink> |
| <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" xlink:type="extended" xlink:title="40601 - Disclosure - Inventories, net (Details)" xmlns="http://www.xbrl.org/2003/linkbase"> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_635454461843894040"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_635454461843894040" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_636453001944121703" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_635454461843894040" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_636453001944121703" order="2" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_635454461843894040" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_636453001944121703" order="3" use="optional" weight="1"/> |
| | </calculationLink> |
| <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" xlink:type="extended" xlink:title="40701 - Disclosure - Product Warranty (Details)" xmlns="http://www.xbrl.org/2003/linkbase"> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_636453001944121703" order="1" use="optional" weight="1"/> |
| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_636453001944121703"/> |
| | <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrualNoncurrent_636453001944121703" order="2" use="optional" weight="1" priority="2"/> |
| | </calculationLink> |
| </link:linkbase> |