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| | <loc xlink:type="locator" xlink:href="acls-20170930.xsd#acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_636453001944589709"/> |
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| | <loc xlink:type="locator" xlink:href="acls-20170930.xsd#acls_DepositRelatingToCustomsActivity" xlink:label="acls_DepositRelatingToCustomsActivity_636453001944589709"/> |
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| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_636453001944589709"/> |
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| | <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2016/elts/us-gaap-2016-01-31.xsd#us-gaap_InventoryValuationReserves" xlink:label="us-gaap_InventoryValuationReserves_636453001944589709"/> |
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| | <loc xlink:type="locator" xlink:href="acls-20170930.xsd#acls_ProductWarrantyPeriod" xlink:label="acls_ProductWarrantyPeriod_636453001944589709"/> |
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