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| | | <ShortName> All Reports </ShortName> |
| | | </Report> |
| | </MyReports> |
| <InputFiles> |
| | <File> acls-20170930.xml </File> |
| | <File> acls-20170930.xsd </File> |
| | <File> acls-20170930_cal.xml </File> |
| | <File> acls-20170930_def.xml </File> |
| | <File> acls-20170930_lab.xml </File> |
| | <File> acls-20170930_pre.xml </File> |
| | </InputFiles> |
| <SupplementalFiles/> |
| <BaseTaxonomies> |
| | <BaseTaxonomy> http://xbrl.sec.gov/dei/2014-01-31 </BaseTaxonomy> |
| | <BaseTaxonomy> http://fasb.org/us-gaap/2016-01-31 </BaseTaxonomy> |
| | </BaseTaxonomies> |
| <HasPresentationLinkbase> true </HasPresentationLinkbase> |
| <HasCalculationLinkbase> true </HasCalculationLinkbase> |
| </FilingSummary> |